发明申请
- 专利标题: Advanced-process-control system utilizing a lambda tuner
- 专利标题(中): 使用lambda调谐器的高级过程控制系统
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申请号: US12006411申请日: 2007-12-31
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公开(公告)号: US20090171638A1公开(公告)日: 2009-07-02
- 发明人: Toshihiro Morisawa , Andrew C. Walker , Yeak-Chong Wong
- 申请人: Toshihiro Morisawa , Andrew C. Walker , Yeak-Chong Wong
- 主分类号: G06G7/48
- IPC分类号: G06G7/48 ; G05B13/04
摘要:
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.
公开/授权文献
- US07809459B2 Advanced-process-control system utilizing a lambda tuner 公开/授权日:2010-10-05
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