发明申请
US20090174052A1 ELECTRONIC COMPONENT, SEMICONDUCTOR PACKAGE, AND ELECTRONIC DEVICE
审中-公开
电子元件,半导体封装和电子器件
- 专利标题: ELECTRONIC COMPONENT, SEMICONDUCTOR PACKAGE, AND ELECTRONIC DEVICE
- 专利标题(中): 电子元件,半导体封装和电子器件
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申请号: US12298285申请日: 2007-05-22
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公开(公告)号: US20090174052A1公开(公告)日: 2009-07-09
- 发明人: Yoshimichi Sogawa , Takao Yamazaki , Nobuaki Takahashi
- 申请人: Yoshimichi Sogawa , Takao Yamazaki , Nobuaki Takahashi
- 申请人地址: JP Minato-ku, Tokyo JP Kawasaki-shi, Kanagawa
- 专利权人: NEC CORPORATION,NEC ELECTRONICS CORPORATION
- 当前专利权人: NEC CORPORATION,NEC ELECTRONICS CORPORATION
- 当前专利权人地址: JP Minato-ku, Tokyo JP Kawasaki-shi, Kanagawa
- 优先权: JP2006-148207 20060529; JP2007-010094 20070119
- 国际申请: PCT/JP2007/060423 WO 20070522
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
In a conventional UBM made of, for example, Cu, Ni, or NiP, there has been a problem that when an electronic component is held in high-temperature conditions for an extended period, the barrier characteristic of the UBM is lost and the bonding strength decreases due to formation of a brittle alloy layer at a bonding interface. The present invention improves the problem of decrease in long-term connection reliability of a solder connection portion after storage at high temperatures. An electronic component comprises the electronic component includes an electrode pad formed on a substrate or a semiconductor element and a barrier metal layer formed to cover the electrode pad and the barrier metal layer comprises a CuNi alloy layer on the side opposite the side in contact with the electrode pad, the CuNi alloy layer containing 15 to 60 at % of Cu and 40 to 85 at % of Ni.
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