发明申请
- 专利标题: VIBRATING GYROSENSOR
- 专利标题(中): 振动陀螺仪
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申请号: US12116646申请日: 2008-05-07
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公开(公告)号: US20090174292A1公开(公告)日: 2009-07-09
- 发明人: Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
- 申请人: Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-106718 20050304; JP2005-063075 20050307; JP2005-190234 20050629; JP2005-374326 20051227
- 主分类号: H01L41/04
- IPC分类号: H01L41/04
摘要:
A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.
公开/授权文献
- US07723905B2 Vibrating gyrosensor driven with offset potential 公开/授权日:2010-05-25
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