发明申请
US20090179658A1 PROBER FOR TESTING DEVICES IN A REPEAT STRUCTURE ON A SUBSTRATE
有权
用于测试基板上重复结构中的设备的探测器
- 专利标题: PROBER FOR TESTING DEVICES IN A REPEAT STRUCTURE ON A SUBSTRATE
- 专利标题(中): 用于测试基板上重复结构中的设备的探测器
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申请号: US12345980申请日: 2008-12-30
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公开(公告)号: US20090179658A1公开(公告)日: 2009-07-16
- 发明人: Frank-Michael WERNER , Matthias ZIEGER , Sebastian GIESSMANN
- 申请人: Frank-Michael WERNER , Matthias ZIEGER , Sebastian GIESSMANN
- 申请人地址: DE Sacka
- 专利权人: SUSS MICROTEC TEST SYSTEMS GMBH
- 当前专利权人: SUSS MICROTEC TEST SYSTEMS GMBH
- 当前专利权人地址: DE Sacka
- 优先权: DE102008003754.0 20080110
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
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