公开(公告)号：US20110316574A1

公开(公告)日：2011-12-29

申请号：US13094604

申请日：2011-04-26

申请人： Frank-Michael WERNER ,  Matthias ZIEGER ,  Sebastian GIESSMANN

发明人： Frank-Michael WERNER ,  Matthias ZIEGER ,  Sebastian GIESSMANN

IPC分类号： G01R31/20

CPC分类号： G01R1/073 ,  G01R1/04 ,  G01R31/2891

摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。

公开(公告)号：US20090179658A1

公开(公告)日：2009-07-16

申请号：US12345980

申请日：2008-12-30

申请人： Frank-Michael WERNER ,  Matthias ZIEGER ,  Sebastian GIESSMANN

发明人： Frank-Michael WERNER ,  Matthias ZIEGER ,  Sebastian GIESSMANN

IPC分类号： G01R31/02

CPC分类号： G01R1/073 ,  G01R1/04 ,  G01R31/2891

摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。