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公开(公告)号：US20110316574A1
公开(公告)日：2011-12-29
申请号：US13094604
申请日：2011-04-26
IPC分类号： G01R31/20
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US07932737B2
公开(公告)日：2011-04-26
申请号：US12345980
申请日：2008-12-30
IPC分类号： G01R31/00
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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3.发明授权公开(公告)号：US07671615B2
公开(公告)日：2010-03-02
申请号：US11839899
申请日：2007-08-16
申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
发明人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , H01L21/67109
摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。
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公开(公告)号：US08841932B2
公开(公告)日：2014-09-23
申请号：US13094604
申请日：2011-04-26
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US07741860B2
公开(公告)日：2010-06-22
申请号：US12145090
申请日：2008-06-24
CPC分类号： G11C29/56 , G01R31/2862 , G01R31/315 , G11C29/56016 , G11C2029/5602
摘要： A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.
摘要翻译： 用于测试部件的检测器包括下框架，探针保持板在其上设置一段距离，用于接收与要测试的部件接触的测试探针，并且与其连接的位移装置。 衬底载体设置在框架和探针保持板之间的空间中，并且探针保持板设置有开口，在该开口下方可以移动衬底载体。 为了扩大用于测试组件的探测器的应用范围，围绕衬底的探测器的所有组件由非磁性材料制成。
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公开(公告)号：US20090179658A1
公开(公告)日：2009-07-16
申请号：US12345980
申请日：2008-12-30
IPC分类号： G01R31/02
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US20090058442A1
公开(公告)日：2009-03-05
申请号：US12145090
申请日：2008-06-24
IPC分类号： G01R1/073
CPC分类号： G11C29/56 , G01R31/2862 , G01R31/315 , G11C29/56016 , G11C2029/5602
摘要： A prober for testing components comprises a lower frame, over which a probe holder plate is disposed at a distance therefrom for receiving test probes that make contact with the components to be tested and to which a displacement device is connected. A substrate carrier is disposed in the space between the frame and the probe holder plate, and the probe holder plate is provided with an opening, below which the substrate carrier can be displaced. To expand the scope of application of probers used for testing components, all those components of the prober that surround the substrate are made from a non-magnetic material.
摘要翻译： 用于测试部件的检测器包括下框架，探针保持板在其上设置一段距离，用于接收与要测试的部件接触的测试探针，并且与其连接的位移装置。 衬底载体设置在框架和探针保持板之间的空间中，并且探针保持板设置有开口，在该开口下方可以移动衬底载体。 为了扩大用于测试组件的探测器的应用范围，围绕衬底的探测器的所有组件由非磁性材料制成。
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8.发明申请公开(公告)号：US20080042679A1
公开(公告)日：2008-02-21
申请号：US11839899
申请日：2007-08-16
申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
发明人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , H01L21/67109
摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。
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