发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12421840申请日: 2009-04-10
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公开(公告)号: US20090194771A1公开(公告)日: 2009-08-06
- 发明人: Jun KOYAMA , Koji DAIRIKI , Susumu OKAZAKI , Yoshitaka MORIYA , Shunpei YAMAZAKI
- 申请人: Jun KOYAMA , Koji DAIRIKI , Susumu OKAZAKI , Yoshitaka MORIYA , Shunpei YAMAZAKI
- 申请人地址: JP Kanagawa-ken
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: JP Kanagawa-ken
- 优先权: JP2005-051867 20050225
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L27/088 ; H01L23/52
摘要:
An object of the present invention is to provide a semiconductor device which has flexibility and resistance to a physical change such as bending and a method for manufacturing the semiconductor device. A semiconductor device of the present invention includes a plurality of transistors provided over a flexible substrate, each of which has a semiconductor film, a gate electrode provided over the semiconductor film with a gate insulating film therebetween, and an interlayer insulating film provided to cover the gate electrode, and a bending portion provided between the plurality of transistors, in which the bending portion is provided by filling an opening formed in the interlayer insulating film with a material having a lower elastic modulus, a material having a lower glass transition point, or a material having a higher plasticity than that of the interlayer insulating film.
公开/授权文献
- US07906784B2 Semiconductor device and method for manufacturing the same 公开/授权日:2011-03-15
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