发明申请
- 专利标题: POLISHING FLUID COMPOSITION
- 专利标题(中): 抛光液组合物
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申请号: US12415548申请日: 2009-03-31
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公开(公告)号: US20090197415A1公开(公告)日: 2009-08-06
- 发明人: Shigeo FUJII , Yoshiaki Oshima , Koichi Naito
- 申请人: Shigeo FUJII , Yoshiaki Oshima , Koichi Naito
- 申请人地址: JP Tokyo
- 专利权人: Kao Corporation
- 当前专利权人: Kao Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JPJP2000-219605 20000719
- 主分类号: H01L21/304
- IPC分类号: H01L21/304
摘要:
To provide a polishing composition capable of increasing polishing rate and reducing surface roughness, without causing surface defects on a surface of an object to be polished; and a polishing process for a substrate to be polished. [1] a polishing composition comprising water, an abrasive, an intermediate alumina, and a polycarboxylic acid having 4 or more carbon atoms with no OH groups or a salt thereof, wherein a content of the intermediate alumina is from 1 to 90 parts by weight, based on 100 parts by weight of the abrasive; and [2] a polishing process for a substrate to be polished, comprising polishing a substrate to be polished under conditions that a composition of a polishing liquid during polishing is the composition as defined in item [1] above.
公开/授权文献
- US07955517B2 Polishing fluid composition 公开/授权日:2011-06-07
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