发明申请
- 专利标题: Polishing apparatus and substrate processing method
- 专利标题(中): 抛光装置和基板处理方法
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申请号: US11631417申请日: 2005-07-21
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公开(公告)号: US20090209175A1公开(公告)日: 2009-08-20
- 发明人: Kenichiro Saito , Akihiro Yazawa , Masanori Sasaki , Takashi Mitsuya
- 申请人: Kenichiro Saito , Akihiro Yazawa , Masanori Sasaki , Takashi Mitsuya
- 优先权: JP2004-214598 20040722
- 国际申请: PCT/JP05/13784 WO 20050721
- 主分类号: B24B49/12
- IPC分类号: B24B49/12 ; B24B37/04 ; B24B7/20
摘要:
A polishing apparatus can detect escape of a substrate from a top ring during polishing. The polishing apparatus including: a polishing table (10) having a polishing pad (11); a top ring (21); and a substrate escape detection section for detecting escape of the substrate from the top ring, including a light irradiation member (26) for irradiating an area of the upper surface of the polishing pad with light, a controller (32) for controlling the light irradiation of the light irradiation member, an image-taking member (27) for taking an image of the area irradiated with the light, and an information processing member (31) for processing information outputted from the image-taking member, wherein said controller controls the light irradiation member in such a manner that it performs light irradiation at least for a period of time during which the substrate is regarded as being in contact with the polishing pad.
公开/授权文献
- US08128458B2 Polishing apparatus and substrate processing method 公开/授权日:2012-03-06
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