发明申请
US20090217969A1 Method for Manufacturing Photoelectric Converter and Photoelectric Converter
审中-公开
光电转换器和光电转换器的制造方法
- 专利标题： Method for Manufacturing Photoelectric Converter and Photoelectric Converter
- 专利标题（中）： 光电转换器和光电转换器的制造方法
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申请号： US12084281申请日： 2006-10-31
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公开(公告)号： US20090217969A1公开(公告)日： 2009-09-03
- 发明人: Osamu Matsushima , Masaki Takaoka , Shogo Ishizuka , Shigeru Niki , Keiichiro Sakurai
- 申请人： Osamu Matsushima , Masaki Takaoka , Shogo Ishizuka , Shigeru Niki , Keiichiro Sakurai
- 申请人地址： JP Kyoto
- 专利权人： ROHM CO., LTD.
- 当前专利权人： ROHM CO., LTD.
- 当前专利权人地址： JP Kyoto
- 优先权： JP2005-316789 20051031
- 国际申请： PCT/JP2006/321768 WO 20061031
- 主分类号： H01L31/00
- IPC分类号： H01L31/00 ; H01L31/0272
摘要：
Disclosed is a method for manufacturing a photoelectric converter wherein a lower electrode layer, a compound semiconductor thin film having a chalcopyrite structure which serves as a light absorptive layer and a light-transmitting electrode layer that are laminated to form layers are each patterned by photolithography, thereby minimizing damages to the crystals of the compound semiconductor thin film.
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