发明申请
US20090220788A1 METHOD FOR SYNTHESIZING ULTRAHIGH-PURITY SILICON CARBIDE 审中-公开
用于合成超高纯度碳化硅的方法

METHOD FOR SYNTHESIZING ULTRAHIGH-PURITY SILICON CARBIDE
摘要:
Adsorbed gaseous species and elements in a carbon (C) powder and a graphite crucible are reduced by way of a vacuum and an elevated temperature sufficient to cause reduction. A wall and at least one end of an interior of the crucible is lined with C powder purified in the above manner. An Si+C mixture is formed with C powder purified in the above manner and Si powder or granules. The lined crucible is charged with the Si+C mixture. Adsorbed gaseous species and elements are reduced from the Si+C mixture and the crucible by way of a vacuum and an elevated temperature that is sufficient to cause reduction but which does not exceed the melting point of Si. Thereafter, by way of a vacuum and an elevated temperature, the Si+C mixture is caused to react and form polycrystalline SiC.
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