发明申请
- 专利标题: Interlayer Design for Epitaxial Growth of Semiconductor Layers
- 专利标题(中): 半导体层外延生长的层间设计
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申请号: US12405963申请日: 2009-03-17
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公开(公告)号: US20090235983A1公开(公告)日: 2009-09-24
- 发明人: Erol Girt , Mariana Rodica Munteanu
- 申请人: Erol Girt , Mariana Rodica Munteanu
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Quantum Technology, LLC
- 当前专利权人: Applied Quantum Technology, LLC
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; H01L29/12
摘要:
An interlayer structure that, in one implementation, includes a combination of an amorphous or nano-crystalline seed-layer, and one or more metallic layers, deposited on the seed layer, with the fcc, hcp or bcc crystal structure is used to epitaxially orient a semiconductor layer on top of non-single-crystal substrates. In some implementations, this interlayer structure is used to establish epitaxial growth of multiple semiconductor layers, combinations of semiconductor and oxide layers, combinations of semiconductor and metal layers and combination of semiconductor, oxide and metal layers. This interlayer structure can also be used for epitaxial growth of p-type and n-type semiconductors in photovoltaic cells.
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