发明申请
- 专利标题: Appearance Inspection Apparatus
- 专利标题(中): 外观检查装置
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申请号: US12482479申请日: 2009-06-11
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公开(公告)号: US20090244529A1公开(公告)日: 2009-10-01
- 发明人: Kenji Oka , Shigeru Matsui
- 申请人: Kenji Oka , Shigeru Matsui
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-207780 20060731
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.
公开/授权文献
- US07773210B2 Appearance inspection apparatus 公开/授权日:2010-08-10