公开(公告)号：US20090244529A1

公开(公告)日：2009-10-01

申请号：US12482479

申请日：2009-06-11

申请人： Kenji Oka ,  Shigeru Matsui

发明人： Kenji Oka ,  Shigeru Matsui

IPC分类号： G01N21/88

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US07557911B2

公开(公告)日：2009-07-07

申请号：US11830320

申请日：2007-07-30

申请人： Kenji Oka ,  Shigeru Matsui

发明人： Kenji Oka ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US20120194808A1

公开(公告)日：2012-08-02

申请号：US13432153

申请日：2012-03-28

申请人： Kenji OKA ,  Shigeru Matsui

发明人： Kenji OKA ,  Shigeru Matsui

IPC分类号： G01N21/88

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US20080024765A1

公开(公告)日：2008-01-31

申请号：US11830320

申请日：2007-07-30

申请人： Kenji OKA ,  Shigeru Matsui

发明人： Kenji OKA ,  Shigeru Matsui

IPC分类号： G01N21/00 ,  G06F19/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： It is an object of the present invention to provide an appearance inspection apparatus capable of analyzing a difference in detection characteristics of detection signals obtained by a plurality of detectors, and capable of flexibly meeting various inspection purposes without changing a circuit or software.An appearance inspection apparatus including a sample stage 101 for supporting a sample 100, an illumination light source 103 for irradiating the sample 100 on the sample stage 101 with illumination light 111, a plurality of detectors 120a to 120d which are disposed at different positions from each other with respect to an illumination light spot of the illumination light source 103, and which detect scattered light 112 generated from a surface of the sample 100, a signal synthesizing section 105 which synthesizes detection signals from the plurality of detectors 120a to 120d in accordance with a set condition, an input operating section 109 for setting a synthesizing condition of the detection signal by the signal synthesizing section 105, and an information display section 108 for displaying a synthesizing map 220a structured based on a synthesized signal which is synthesized by the signal synthesizing section 105 in accordance with a condition set by the input operating section 109.

摘要翻译： 本发明的目的是提供一种外观检查装置，其能够分析由多个检测器获得的检测信号的检测特性的差异，并且能够灵活地满足各种检查目的而不改变电路或软件。 一种外观检查装置，包括用于支撑样品100的样品台101，用于用照明光111照射样品台101上的样品100的照明光源103，设置在不同位置的多个检测器120a至120d 相对于照明光源103的照明光点，检测从样品100的表面产生的散射光112的信号合成部105，其合成来自多个检测器120a〜120的检测信号 d，根据设定条件设置用于设置信号合成部分105的检测信号的合成条件的输入操作部分109和用于显示基于合成信号构成的合成图220a的信息显示部分108a 由信号合成部105根据由输入操作部设定的条件合成 109。

公开(公告)号：US08462327B2

公开(公告)日：2013-06-11

申请号：US13432153

申请日：2012-03-28

申请人： Kenji Oka ,  Shigeru Matsui

发明人： Kenji Oka ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

公开(公告)号：US08169606B2

公开(公告)日：2012-05-01

申请号：US12823290

申请日：2010-06-25

申请人： Kenji Oka ,  Shigeru Matsui

发明人： Kenji Oka ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US07773210B2

公开(公告)日：2010-08-10

申请号：US12482479

申请日：2009-06-11

申请人： Kenji Oka ,  Shigeru Matsui

发明人： Kenji Oka ,  Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/8851 ,  G01N21/9501

摘要： An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section.

摘要翻译： 外观检查装置分析由检测器获得的检测信号的检测特性的差异，以灵活地满足各种检查目的，而不改变电路或软件。 该装置包括信号合成部，其根据设定条件合成来自检测器的检测信号。 输入操作部分通过信号合成部分设置检测信号的合成条件，并且信息显示部分显示由信号合成部分根据由输入设置的条件合成的合成信号构成的合成图 操作部分。

公开(公告)号：US08305568B2

公开(公告)日：2012-11-06

申请号：US13032165

申请日：2011-02-22

申请人： Shigeru Matsui ,  Masayuki Hachiya

发明人： Shigeru Matsui ,  Masayuki Hachiya

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When the sum of scattered, diffracted, and reflected lights due to the illumination beams is detected, influence of the anisotropy which a contaminant particle and a defect existing in the wafer itself or thereon have with respect to an illumination direction, can be eliminated.

摘要翻译： 来自光源的光由分束器变成两个照明光束。 光束从具有基本相等的仰角的两个相互基本正交的方位角照射到半导体晶片上，以形成照明点。 当检测到由于照明光束引起的散射，衍射和反射光的总和时，可以消除晶片本身或其上存在的污染颗粒和缺陷相对于照明方向的各向异性的影响。

公开(公告)号：US07916287B2

公开(公告)日：2011-03-29

申请号：US12754634

申请日：2010-04-06

申请人： Shigeru Matsui ,  Masayuki Hachiya

发明人： Shigeru Matsui ,  Masayuki Hachiya

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： Light from a light source becomes two illumination beams by a beam splitter. The beams are irradiated onto a semiconductor wafer from two mutually substantially orthogonal azimuthal angles having substantially equal elevation angles to form illumination spots. When the sum of scattered, diffracted, and reflected lights due to the illumination beams is detected, influence of the anisotropy which a contaminant particle and a defect existing in the wafer itself or thereon have with respect to an illumination direction, can be eliminated.

摘要翻译： 来自光源的光由分束器变成两个照明光束。 光束从具有基本相等的仰角的两个相互基本正交的方位角照射到半导体晶片上，以形成照明点。 当检测到由于照明光束引起的散射，衍射和反射光的总和时，可以消除晶片本身或其上存在的污染颗粒和缺陷相对于照明方向的各向异性的影响。

公开(公告)号：US07761246B2

公开(公告)日：2010-07-20

申请号：US12349206

申请日：2009-01-06

申请人： Shigeru Matsui

发明人： Shigeru Matsui

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： When detecting light scattered by an object to be inspected by using a pulse laser as a light source, noise increases unless a sampling repletion period of an A/D converter is determined so as to be related to a pulse oscillation repetition period of the light source. (1) The sampling repletion period of the A/D converter is set equal to the pulse oscillation repetition period of the light source or an integer times thereof, and the sampling is synchronized with oscillation of the light source. Or (2) the sampling repletion period of the A/D converter is set equal to a half-integer times the pulse oscillation repetition period of the light source. Even if a ripple component resulting from emission pulses of the light source remains in the scattered light signal supplied to the A/D converter remains, therefore, its influence can be eliminated or reduced.

摘要翻译： 当通过使用脉冲激光器作为光源检测被检查物体散射的光时，噪声增加，除非确定A / D转换器的采样恢复周期以与光源的脉冲振荡重复周期相关 。 （1）A / D转换器的采样补偿周期被设定为等于光源的脉冲振荡重复周期或其整数倍，采样与光源的振荡同步。 或者（2）将A / D转换器的采样恢复周期设定为等于光源的脉冲振荡重复周期的半个整数倍。 即使由于光源的发射脉冲而产生的纹波分量残留在供给A / D转换器的散射光信号中，因此可以消除或减小其影响。