发明申请
- 专利标题: Crystalline Semiconductor Stripe Transistor
- 专利标题(中): 晶体半导体条形晶体管
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申请号: US12099756申请日: 2008-04-08
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公开(公告)号: US20090250700A1公开(公告)日: 2009-10-08
- 发明人: Themistokles Afentakis , Robert S. Sposili , Apostolos T. Voutsas
- 申请人: Themistokles Afentakis , Robert S. Sposili , Apostolos T. Voutsas
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/336 ; H01L29/76
摘要:
A transistor with crystalline semiconductor stripes and an associated fabrication process are provided. The method provides a substrate, and deposits a semiconductor layer overlying the substrate. The semiconductor layer is irradiated using a scanning step-and-repeat laser annealing process, which agglomerates portions of the semiconductor layer. In response to cooling agglomerated semiconductor material, a transistor active semiconductor region is formed including a plurality of crystalline semiconductor stripes oriented along parallel axes. In one aspect, a channel region is formed from the plurality of oriented crystalline semiconductor stripes, and the method forms a gate dielectric overlying the channel region, with a gate electrode overlying the gate dielectric. In another aspect, forming the transistor active semiconductor region includes forming source, drain, and channel regions from the plurality of oriented crystalline semiconductor stripes.
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