发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US12417341申请日: 2009-04-02
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公开(公告)号: US20090250743A1公开(公告)日: 2009-10-08
- 发明人: Sang Min Kim
- 申请人: Sang Min Kim
- 申请人地址: KR Icheon-si
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon-si
- 优先权: KR10-2008-0031619 20080404
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L21/28
摘要:
A semiconductor memory device has side surfaces of neighboring bit lines that do not face each other to reduce a capacitance of a parasitic capacitor formed between adjacent bit lines. The semiconductor memory device includes contact plugs formed on a semiconductor substrate. Each contact plug is disposed between gate patterns. First and second conductive pads extend in different directions and are connected to the contact plugs. First and second pad contact plugs are formed on extended peripheries of the first and second conductive pads, respectively. Each of the first pad contact plugs has a height which differs from a height of each of the second pad contact plugs. First bit lines are connected to the first pad contact plugs, and second bit lines are connected to the second pad contact plugs.
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