发明申请
US20090253358A1 POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE 有权
具有集成式窗条的抛光物品

POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE
摘要:
A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.
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