发明申请
- 专利标题: POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE
- 专利标题(中): 具有集成式窗条的抛光物品
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申请号: US12488437申请日: 2009-06-19
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公开(公告)号: US20090253358A1公开(公告)日: 2009-10-08
- 发明人: Gregory E. Menk , Peter McReynolds , Erik S. Rondum , Anand N. Iyer , Gopalakrishna B. Prabhu , Garlen C. Leung
- 申请人: Gregory E. Menk , Peter McReynolds , Erik S. Rondum , Anand N. Iyer , Gopalakrishna B. Prabhu , Garlen C. Leung
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B24D11/00
- IPC分类号: B24D11/00
摘要:
A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.
公开/授权文献
- US07841925B2 Polishing article with integrated window stripe 公开/授权日:2010-11-30
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