发明申请
US20090257151A1 Thin seeded Co/Ni multilayer film with perpendicular anisotropy for spintronic device applications
有权
用于自旋电子器件应用的具有垂直各向异性的薄晶种Co / Ni多层膜
- 专利标题: Thin seeded Co/Ni multilayer film with perpendicular anisotropy for spintronic device applications
- 专利标题(中): 用于自旋电子器件应用的具有垂直各向异性的薄晶种Co / Ni多层膜
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申请号: US12456621申请日: 2009-06-19
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公开(公告)号: US20090257151A1公开(公告)日: 2009-10-15
- 发明人: Kunliang Zhang , Min Li , Yuchen Zhou , Soichi Oikawa , Kenichiro Yamada , Katsuhiko Koui
- 申请人: Kunliang Zhang , Min Li , Yuchen Zhou , Soichi Oikawa , Kenichiro Yamada , Katsuhiko Koui
- 专利权人: TDK Corporation & Kabushiki Kaisha Toshiba
- 当前专利权人: TDK Corporation & Kabushiki Kaisha Toshiba
- 主分类号: G11B5/33
- IPC分类号: G11B5/33 ; B05D5/00 ; C23C14/35
摘要:
A spin valve structure for a spintronic device is disclosed and includes a composite seed layer made of at least Ta and a metal layer having a fcc(111) or hcp(001) texture to enhance perpendicular magnetic anisotropy (PMA) in an overlying (Co/Ni)x multilayer. The (Co/Ni)x multilayer is deposited by a low power and high Ar pressure process to avoid damaging Co/Ni interfaces and thereby preserving PMA. As a result, only a thin seed layer is required. PMA is maintained even after annealing at 220° C. for 10 hours. Examples of GMR and TMR spin valves are described and may be incorporated in spin transfer oscillators and spin transfer MRAMs. The free layer is preferably made of a FeCo alloy including at least one of Al, Ge, Si, Ga, B, C, Se, Sn, or a Heusler alloy, or a half Heusler alloy to provide high spin polarization and a low magnetic damping coefficient.
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