发明申请
- 专利标题: POSITIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMERIC COMPOUND
- 专利标题(中): 正极性组合物,形成耐火模式的方法和聚合物
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申请号: US12425706申请日: 2009-04-17
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公开(公告)号: US20090269694A1公开(公告)日: 2009-10-29
- 发明人: Hiroaki Shimizu , Tsuyoshi Nakamura , Takayoshi Mori , Sanae Furuya , Daiju Shiono , Tomoyuki Hirano , Takahiro Dazai
- 申请人: Hiroaki Shimizu , Tsuyoshi Nakamura , Takayoshi Mori , Sanae Furuya , Daiju Shiono , Tomoyuki Hirano , Takahiro Dazai
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2008-114190 20080424
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004 ; C08F222/10 ; C08F224/00
摘要:
A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) including a polymeric compound (A1) having a structural unit (a0-1) represented by general formula (a0-1) (wherein R1 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; R8 represents a divalent linking group; and R7 represents an acid dissociable, dissolution inhibiting group) and a structural unit (a0-2) represented by general formula (a0-2) (wherein R3 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; R4 represents a branched alkyl group of 3 or more carbon atoms; and each of R5 and R6 independently represents an alkyl group, wherein R5 and R6 are mutually bonded to form a ring).
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