公开(公告)号：US08541529B2

公开(公告)日：2013-09-24

申请号：US13454399

申请日：2012-04-24

Applicant: Takahiro Dazai ,  Tomoyuki Hirano ,  Daiju Shiono ,  Tasuku Matsumiya

Inventor： Takahiro Dazai ,  Tomoyuki Hirano ,  Daiju Shiono ,  Tasuku Matsumiya

IPC: C08F20/38 ,  C08F28/06 ,  G03F7/039

CPC classification number: G03F7/2041 ,  C08F28/06 ,  C08F220/28 ,  C08F228/06 ,  G03F7/0045 ,  G03F7/0397

Abstract: A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) including a polymeric compound (A1) containing a structural unit (a0) represented by general formula (a0-1) (R2 represents a divalent linking group, and R3 represents a cyclic group containing —SO2— within the ring skeleton thereof) and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group.

Abstract translation: 一种正性抗蚀剂组合物，其包含在酸的作用下在碱性显影液中显示出增加的溶解度的碱成分（A）和暴露时产生酸的酸产生剂组分（B），所述碱成分（A）包含高分子化合物 A1），其含有由通式（a0-1）表示的结构单元（a0）（R2表示二价连接基团，R3表示在其环骨架中含有-SO2-的环状基团）和结构单元（a1）得自 来自含有酸解离的溶解抑制基团的丙烯酸酯。

公开(公告)号：US08475997B2

公开(公告)日：2013-07-02

申请号：US13336131

申请日：2011-12-23

Applicant: Daiju Shiono ,  Tomoyuki Hirano ,  Sanae Furuya ,  Takahiro Dazai ,  Hiroaki Shimizu ,  Tsuyoshi Kurosawa ,  Hideto Nito ,  Tsuyoshi Nakamura

Inventor： Daiju Shiono ,  Tomoyuki Hirano ,  Sanae Furuya ,  Takahiro Dazai ,  Hiroaki Shimizu ,  Tsuyoshi Kurosawa ,  Hideto Nito ,  Tsuyoshi Nakamura

IPC: G03F7/039 ,  G03F7/20 ,  G03F7/30

CPC classification number: C08F214/18 ,  C08F220/18 ,  C08F220/24 ,  C08F220/28 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397 ,  G03F7/2041 ,  Y10S430/108 ,  Y10S430/111

Abstract: A resist composition for immersion exposure including: a fluorine-containing polymeric compound (F) containing a structural unit (f1) having a base dissociable group and a structural unit (f2) represented by general formula (f2-1) (wherein R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; and W is a group represented by any one of general formulas (w-1) to (w-4)); a base component (A) that exhibits changed solubility in an alkali developing solution under the action of acid; and an acid generator component (B) that generates acid upon exposure.

Abstract translation: 一种浸渍曝光用抗蚀剂组合物，包括：含有具有碱解离基团的结构单元（f1）和由通式（f2-1）表示的结构单元（f2）的含氟聚合物（F）（其中R表示 氢原子，低级烷基或卤代低级烷基; W为通式（w-1）〜（w-4）中任一个表示的基团）; 在酸性作用下在碱性显影液中表现出改变的溶解性的碱成分（A） 和在曝光时产生酸的酸发生剂组分（B）。

公开(公告)号：US08440385B2

公开(公告)日：2013-05-14

申请号：US12979076

申请日：2010-12-27

Applicant: Tomoyuki Hirano ,  Daiju Shiono ,  Masatoshi Arai

Inventor： Tomoyuki Hirano ,  Daiju Shiono ,  Masatoshi Arai

IPC: G03F7/039 ,  G03F7/20 ,  G03F7/30

CPC classification number: G03F7/0397 ,  C08F220/38 ,  C08F2220/283 ,  G03F7/0045 ,  G03F7/0046 ,  C08F220/18 ,  C08F2220/281 ,  C08F2220/382

Abstract: A positive resist composition including a base component (A′) which exhibits increased solubility in an alkali developing solution under the action of acid and generates acid upon exposure, the base component (A′) including a resin component (A1) having a structural unit (a0-1) represented by general formula (a0-1), a structural unit (a0-2) which generates acid upon exposure and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group (wherein R1 represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R2 represents a divalent linking group, and R3 represents a cyclic group containing —SO2— within the ring skeleton thereof).

Abstract translation: 一种正性抗蚀剂组合物，其包含在酸性作用下在碱性显影液中显示出增加的溶解性并在曝光时产生酸的基础组分（A'），所述基础组分（A'）包括具有结构单元的树脂组分（A1） 由通式（a0-1）表示的（a0-1），曝光时产生酸的结构单元（a0-2）和由含有酸解离的溶解抑制基团的丙烯酸酯衍生的结构单元（a1）（其中 R 1表示氢原子，1〜5个碳原子的烷基或1〜5个碳原子的卤代烷基，R 2表示二价连接基团，R 3表示在其环骨架中含有-SO 2 - 的环状基团） 。

公开(公告)号：US20120308928A1

公开(公告)日：2012-12-06

申请号：US13477516

申请日：2012-05-22

Applicant: Tomoyuki Hirano ,  Daiju Shiono ,  Daichi Takaki ,  Junichi Tsuchiya

Inventor： Tomoyuki Hirano ,  Daiju Shiono ,  Daichi Takaki ,  Junichi Tsuchiya

IPC: C08F228/06 ,  G03F7/20 ,  G03F7/004

CPC classification number: C08F220/32 ,  C08F220/58 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2041 ,  G03F7/38 ,  Y10S430/107 ,  Y10S430/111 ,  C08F220/28 ,  C08F2220/585 ,  C08F220/18 ,  C08F220/20

Abstract: A resist composition including a base component (A) that exhibits changed solubility in a developing solution under action of acid and an acid generator component (B) that generates acid upon exposure, wherein the base component (A) contains a resin component (A1) including a structural unit (a0) represented by general formula (a0-1) shown below and a structural unit (a1)) containing an acid decomposable group that exhibits increased polarity under action of acid, and the amount of the structural unit (a0) is less than 50 mol %, wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R1 represents a divalent linking group; R2 represents a —SO2— containing cyclic group; and v represents 0 or 1.

Abstract translation: 一种抗蚀剂组合物，其包含在酸作用下显影溶液中溶解度变差的碱成分（A）和曝光时产生酸的酸发生剂成分（B），其中，所述基材（A）含有树脂成分（A1） （a0）表示的结构单元（a0）和结构单元（a1）），其含有在酸作用下显示出极性增加的酸分解基团，结构单元（a0） 小于50摩尔％，其中R表示氢原子，1至5个碳原子的烷基或1至5个碳原子的卤代烷基; R1表示二价连接基团; R2表示含-SO2-的环状基团; v表示0或1。

公开(公告)号：US20120208131A1

公开(公告)日：2012-08-16

申请号：US13372740

申请日：2012-02-14

Applicant: Tomoyuki Hirano ,  Daiju Shiono

Inventor： Tomoyuki Hirano ,  Daiju Shiono

IPC: G03F7/20

CPC classification number: G03F7/325 ,  G03F7/0397 ,  G03F7/2041

Abstract: A method of forming a resist pattern including: forming a resist film on a substrate using a resist composition containing a base component (A) which exhibits increased solubility in an organic solvent under action of acid and an acid generator component which generates acid upon exposure; conducting exposure of the resist film; and patterning the resist film by positive development using a developing solution containing the organic solvent to form a resist pattern, wherein a resin component containing a structural unit derived from an acrylate ester which may have a hydrogen atom bonded to a carbon atom on the α-position substituted with a substituent and contains an acid decomposable group which exhibits increased polarity by action of acid is used as the component (A), and a developing solution that contains a polar organic solvent but contains substantially no alkali components is used as the developing solution.

Abstract translation: 一种形成抗蚀剂图案的方法，包括：使用含有在酸的作用下在有机溶剂中显示增加的溶解度的基础组分（A）的抗蚀剂组合物和在曝光时产生酸的酸产生剂组分的抗酸剂组合物在基材上形成抗蚀剂膜; 进行抗蚀剂膜的曝光; 通过使用含有有机溶剂的显影液进行正显影来形成抗蚀剂膜以形成抗蚀剂图案，其中含有可以具有与α-碳原子上的碳原子键合的氢原子的丙烯酸酯的结构单元的树脂组分， 作为成分（A），使用被取代基取代的含有酸分解性基团的酸分解性基团，作为成分（A），使用含有极性有机溶剂但不含碱成分的显影液作为显影液 。

公开(公告)号：US20120202151A1

公开(公告)日：2012-08-09

申请号：US13454399

申请日：2012-04-24

Applicant: Takahiro Dazai ,  Tomoyuki Hirano ,  Daiju Shiono ,  Tasuku Matsumiya

Inventor： Takahiro Dazai ,  Tomoyuki Hirano ,  Daiju Shiono ,  Tasuku Matsumiya

IPC: G03F7/039 ,  C08F28/06

CPC classification number: G03F7/2041 ,  C08F28/06 ,  C08F220/28 ,  C08F228/06 ,  G03F7/0045 ,  G03F7/0397

Abstract: A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) including a polymeric compound (A1) containing a structural unit (a0) represented by general formula (a0-1) (R2 represents a divalent linking group, and R3 represents a cyclic group containing —SO2— within the ring skeleton thereof) and a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group.

Abstract translation: 一种正性抗蚀剂组合物，其包含在酸的作用下在碱性显影液中显示出增加的溶解度的碱成分（A）和暴露时产生酸的酸产生剂组分（B），所述碱成分（A）包含高分子化合物 A1），其含有由通式（a0-1）表示的结构单元（a0）（R2表示二价连接基团，R3表示在其环骨架中含有-SO2-的环状基团）和结构单元（a1）得自 来自含有酸解离的溶解抑制基团的丙烯酸酯。

公开(公告)号：US20120196226A1

公开(公告)日：2012-08-02

申请号：US13343481

申请日：2012-01-04

Applicant: Shinji Kumada ,  Satoshi Maemori ,  Masatoshi Arai ,  Daiju Shiono

Inventor： Shinji Kumada ,  Satoshi Maemori ,  Masatoshi Arai ,  Daiju Shiono

IPC: G03F7/20 ,  G03F7/004

CPC classification number: G03F7/0045 ,  G03F7/0397 ,  G03F7/20

Abstract: A resist composition including a base component (A), which exhibits changed solubility in a developing solution under the action of acid and can be used in a lithography process that employs light having a wavelength of 193 nm or less as the exposure light source, an acid generator component (B) which generates acid upon exposure, and a polymeric compound (C) having a structural unit (c0) represented by general formula (c0) shown below, wherein the amount of the polymeric compound (C) is less than 25 parts by mass relative to 100 parts by mass of the base component (A). In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, and R1 represents an organic group having one or more primary or secondary alcoholic hydroxyl groups, or a chain-like tertiary alcoholic hydroxyl group.

Abstract translation: 一种抗蚀剂组合物，其包含在酸的作用下在显影液中溶解度变化的碱成分（A），可以用于使用波长为193nm以下的光作为曝光光源的光刻工序， 暴露时产生酸的酸产生剂组分（B）和具有如下所示的通式（c0）表示的结构单元（c0）的聚合化合物（C），其中聚合化合物（C）的量小于25 相对于100质量份的基础成分（A）为质量份。 在该式中，R表示氢原子，1〜5个碳原子的烷基或1〜5个碳原子的卤代烷基，R1表示具有一个或多个伯或仲醇羟基的有机基团，或 链状叔醇羟基。

公开(公告)号：US20110117499A1

公开(公告)日：2011-05-19

申请号：US12824089

申请日：2010-06-25

Applicant: Tasuku MATSUMIYA ,  Daiju SHIONO ,  Tomoyuki HIRANO ,  Takahiro DAZAI

Inventor： Tasuku MATSUMIYA ,  Daiju SHIONO ,  Tomoyuki HIRANO ,  Takahiro DAZAI

IPC: G03F7/004 ,  G03F7/20 ,  C08F18/20

CPC classification number: C09D133/16 ,  C08F220/24 ,  C08F2438/00 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2041 ,  C08L33/08 ,  C08L33/16 ,  C08L53/02 ,  C08F220/18

Abstract: A fluorine-containing polymeric compound which contains a structural unit (f1) that is decomposable in an alkali developing solution as a block copolymer portion, a base component (A) that exhibits increased solubility in an alkali developing solution under the action of acid, and an acid generator component (B) that generates acid upon exposure.

Abstract translation: 含有可在碱性显影液中作为嵌段共聚物部分分解的结构单元（f1）的含氟聚合物，在酸性作用下在碱性显影液中显示出增加的溶解性的碱成分（A），以及 酸性发生剂组分（B），其在暴露时产生酸。

公开(公告)号：US07901865B2

公开(公告)日：2011-03-08

申请号：US11574805

申请日：2005-09-02

Applicant: Taku Hirayama ,  Daiju Shiono ,  Hideo Hada

Inventor： Taku Hirayama ,  Daiju Shiono ,  Hideo Hada

IPC: G03F7/004 ,  G03F7/028 ,  G03F7/039

CPC classification number: G03F7/0392 ,  G03F7/0045 ,  G03F7/0048 ,  Y10S430/114

Abstract: A resist composition that includes a base material component (A), which contains acid-dissociable, dissolution-inhibiting groups and exhibits increased alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), in which the components (A) and (B) are dissolved in the organic solvent (C), wherein the base material component (A) contains a protected form (A1) of a polyhydric phenol compound (a) having two or more phenolic hydroxyl groups and a molecular weight within a range from 300 to 2,500, in which either a portion of, or all of, the phenolic hydroxyl groups are protected with acid-dissociable, dissolution-inhibiting groups, and the organic solvent (C) comprises an alcohol.

Abstract translation: 一种抗蚀剂组合物，其包含基质成分（A），其含有酸解离的溶解抑制基团，并且在酸的作用下显示出增加的碱溶解性，在曝光时产生酸的酸产生剂组分（B）和有机 其中组分（A）和（B）溶解在有机溶剂（C）中的溶剂（C），其中基材组分（A）含有多元酚化合物（a）的保护形式（A1） 两个或更多个酚羟基和分子量在300-2,500的范围内，其中酚羟基的一部分或全部被酸解离的溶解抑制基团保护，并且有机溶剂（ C）包含醇。

公开(公告)号：US07862981B2

公开(公告)日：2011-01-04

申请号：US11917458

申请日：2006-06-07

Applicant: Daiju Shiono ,  Taku Hirayama ,  Hideo Hada

Inventor： Daiju Shiono ,  Taku Hirayama ,  Hideo Hada

IPC: G03C1/00 ,  C07C39/12

CPC classification number: C07C69/712 ,  C07C2603/74 ,  G03F7/0392 ,  G03F7/0397

Abstract: A compound including a polyhydric phenol compound represented by general formula (I) shown below (wherein R11 to R17 each independently represents an alkyl group of 1 to 10 carbon atoms or aromatic hydrocarbon group which may contain a hetero atom in the structure thereof, and X represents an aliphatic cyclic group) and having a molecular weight of 300 to 2,500, in which some or all of the hydrogen atoms of the phenolic hydroxyl groups are substituted with acid dissociable, dissolution inhibiting groups; a positive resist composition containing the compound; and a method of forming a resist pattern using the positive resist composition.

Abstract translation: 含有下述通式（I）表示的多元酚化合物的化合物（其中，R 11〜R 17各自独立地表示碳原子数1〜10的烷基或其结构中可含有杂原子的芳香族烃基，X 代表脂族环基），其分子量为300-2,500，其中酚羟基的一些或全部氢原子被酸解离的溶解抑制基团取代; 含有该化合物的正性抗蚀剂组合物; 以及使用正性抗蚀剂组合物形成抗蚀剂图案的方法。