发明申请
US20090280587A1 METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE USING THE SAME
审中-公开
处理透明玻璃基材的方法及使用其制造显示基板的方法
- 专利标题： METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE USING THE SAME
- 专利标题（中）： 处理透明玻璃基材的方法及使用其制造显示基板的方法
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申请号： US12427996申请日： 2009-04-22
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公开(公告)号： US20090280587A1公开(公告)日： 2009-11-12
- 发明人: Sang-Woo WHANGBO , Bong-Kyu Shin , Sang-Uk Lim , Jun-Hyung Souk , Jin-Ho Ju
- 申请人： Sang-Woo WHANGBO , Bong-Kyu Shin , Sang-Uk Lim , Jun-Hyung Souk , Jin-Ho Ju
- 优先权： KR2008-43508 20080509
- 主分类号： H01L33/00
- IPC分类号： H01L33/00 ; B08B5/00 ; B05D3/10
摘要：
A method of treating a soda-lime glass (SLG) substrate includes cleaning the SLG substrate using an alkali cleaning solution and cleaning the cleaned SLG substrate using a plasma process. The SLG substrate is cleaned using the alkali cleaning solution to remove particles adhered to the SLG substrate. Thus, defects due to the adhering particles may be reduced.
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