发明申请
- 专利标题: RETICLE POD
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申请号: US12088120申请日: 2006-09-27
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公开(公告)号: US20090301917A1公开(公告)日: 2009-12-10
- 发明人: Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
- 申请人: Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
- 申请人地址: US MN Chaska
- 专利权人: ENTEGRIS, INC.
- 当前专利权人: ENTEGRIS, INC.
- 当前专利权人地址: US MN Chaska
- 优先权: US60720762 20050927; US60720777 20050927; US60720778 20050927; US60774391 20060218; US60774537 20060218
- 国际申请: PCT/US06/37465 WO 20060927
- 主分类号: B65D85/48
- IPC分类号: B65D85/48
摘要:
A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
公开/授权文献
- US08231005B2 Reticle pod 公开/授权日:2012-07-31
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