发明申请
- 专利标题： LOAD PORT CONFIGURATIONS FOR SMALL LOT SIZE SUBSTRATE CARRIERS
- 专利标题（中）： 小尺寸基板载体的负载端口配置
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申请号： US12545145申请日： 2009-08-21
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公开(公告)号： US20090308030A1公开(公告)日： 2009-12-17
- 发明人: Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
- 申请人： Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B65B43/00
- IPC分类号： B65B43/00 ; F16M13/02
摘要：
In a first aspect, a method of opening a substrate carrier is provided. The method includes moving the substrate carrier such that a door of the substrate carrier contacts a supporting member; employing the supporting member to support the door; moving a housing of the substrate carrier away from the supporting member; and pivoting the supporting member and door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
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