发明申请
- 专利标题： FILM FORMING METHOD AND FILM FORMING APPARATUS
- 专利标题（中）： 薄膜成型方法和薄膜成型装置
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申请号： US12376038申请日： 2007-07-31
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公开(公告)号： US20090311417A1公开(公告)日： 2009-12-17
- 发明人: Takeshi Masuda , Masahiko Kajinuma , Yutaka Nishioka , Isao Kimura , Shin Kikuchi , Takakazu Yamada , Koukou Suu
- 申请人： Takeshi Masuda , Masahiko Kajinuma , Yutaka Nishioka , Isao Kimura , Shin Kikuchi , Takakazu Yamada , Koukou Suu
- 申请人地址： JP Chigasaki-shi
- 专利权人： ULVAC, INC.
- 当前专利权人： ULVAC, INC.
- 当前专利权人地址： JP Chigasaki-shi
- 优先权： JPP2006-211091 20060802
- 国际申请： PCT/JP2007/064984 WO 20070731
- 主分类号： C23C16/18
- IPC分类号： C23C16/18
摘要：
A film forming method in which crystalline film having PZT (001) or PZT (100) as a principal component thereof is laminated on a foundation film having a (111) oriented noble metal as a principal component thereof, the method including the steps of: performing reduction treatment on a surface of the foundation film; and forming the crystalline film by an MOCVD method on the surface of the foundation film.
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