To accelerate a film formation rate in forming a negative electrode active material film by vapor deposition using an evaporation source containing Si as a principal component, and to provide an electrode for lithium batteries which is superior in productivity, and keeps the charge and discharge capacity at high level are contemplated. The method of manufacturing an electrode for lithium batteries of the present invention includes the steps of: providing an evaporation source containing Si and Fe to give a molar ratio of Fe/(Si+Fe) being no less than 0.0005 and no greater than 0.15; and vapor deposition by melting the evaporation source and permitting evaporation to allow for vapor deposition on a collector directly or through an underlying layer. The electrode for lithium batteries of the present invention includes a collector, and a negative electrode active material film which includes SiFeyOx (wherein, 0