发明申请
US20090317540A1 Methods Of Forming A Non-Volatile Resistive Oxide Memory Array 有权
形成非易失性电阻氧化物记忆阵列的方法

Methods Of Forming A Non-Volatile Resistive Oxide Memory Array
摘要:
A method of forming a non-volatile resistive oxide memory array includes forming a plurality of one of conductive word lines or conductive bit lines over a substrate. Metal oxide-comprising material is formed over the plurality of said one of the word lines or bit lines. A series of elongated trenches is provided over the plurality of said one of the word lines or bit lines. A plurality of self-assembled block copolymer lines is formed within individual of the trenches in registered alignment with and between the trench sidewalls. A plurality of the other of conductive word lines or conductive bit lines is provided from said plurality of self-assembled block copolymer lines to form individually programmable junctions comprising said metal oxide-comprising material where the word lines and bit lines cross one another.
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