发明申请
- 专利标题: VIBRATION TYPE GYRO SENSOR
- 专利标题(中): 振动式陀螺传感器
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申请号: US12306860申请日: 2007-06-29
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公开(公告)号: US20090320593A1公开(公告)日: 2009-12-31
- 发明人: Eiji Nakashio , Shigeto Watanabe , Shin Sasaki , Teruo Inaguma , Junichi Honda , Kazuo Kurihara , Yuji Shishido , Tomoyuki Takahashi
- 申请人: Eiji Nakashio , Shigeto Watanabe , Shin Sasaki , Teruo Inaguma , Junichi Honda , Kazuo Kurihara , Yuji Shishido , Tomoyuki Takahashi
- 申请人地址: JP Tokyo
- 专利权人: SONY CORPORATION
- 当前专利权人: SONY CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-182745 20060630
- 国际申请: PCT/JP2007/063160 WO 20070629
- 主分类号: G01P9/04
- IPC分类号: G01P9/04 ; G01C19/56
摘要:
A vibration type gyro sensor according to the present invention includes vibrating elements 1X and 1Y which detect angular velocities, a support substrate 2 which is electrically connected to the vibrating elements 1X and 1Y and which supports the vibrating elements 1X and 1Y, a relay substrate 4 which is electrically connected to the support substrate 2 and which includes external connection terminals 3, and buffer members 5 which are disposed between the support substrate 2 and the relay substrate 4 and which suppress transmission of strain and vibration between the support substrate 2 and the relay substrate 4. The vibration type gyro sensor is capable of stabilizing vibration characteristics without being influenced by strain and vibration.
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