发明申请
US20090321644A1 BOLOMETER AND METHOD OF PRODUCING A BOLOMETER 有权
制作玻璃体的方法和方法

  • 专利标题: BOLOMETER AND METHOD OF PRODUCING A BOLOMETER
  • 专利标题(中): 制作玻璃体的方法和方法
  • 申请号: US12440274
    申请日: 2006-09-08
  • 公开(公告)号: US20090321644A1
    公开(公告)日: 2009-12-31
  • 发明人: Holger VogtMarco Russ
  • 申请人: Holger VogtMarco Russ
  • 国际申请: PCT/EP06/08790 WO 20060908
  • 主分类号: H01L27/14
  • IPC分类号: H01L27/14 H01L21/28
BOLOMETER AND METHOD OF PRODUCING A BOLOMETER
摘要:
A bolometer includes a membrane, a first spacer and a second spacer, the membrane including resistive and contact layers. At a side facing a foundation, the contact layer has a first contact region at which the first spacer electrically contacts the contact layer, and a second contact region at which the second spacer electrically contacts the contact layer. In this manner, the membrane is kept at a predetermined distance to the foundation. The contact layer is laterally interrupted by a gap, so that the contact layer is subdivided at least into two parts, the first part including the first contact region, and the second part including the second contact region, and no direct connection existing within the contact layer from the first contact region to the second contact region, and the resistive layer being in contact with the first and second parts of the contact layer.
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