发明申请
- 专利标题: BOLOMETER AND METHOD OF PRODUCING A BOLOMETER
- 专利标题(中): 制作玻璃体的方法和方法
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申请号: US12440274申请日: 2006-09-08
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公开(公告)号: US20090321644A1公开(公告)日: 2009-12-31
- 发明人: Holger Vogt , Marco Russ
- 申请人: Holger Vogt , Marco Russ
- 国际申请: PCT/EP06/08790 WO 20060908
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L21/28
摘要:
A bolometer includes a membrane, a first spacer and a second spacer, the membrane including resistive and contact layers. At a side facing a foundation, the contact layer has a first contact region at which the first spacer electrically contacts the contact layer, and a second contact region at which the second spacer electrically contacts the contact layer. In this manner, the membrane is kept at a predetermined distance to the foundation. The contact layer is laterally interrupted by a gap, so that the contact layer is subdivided at least into two parts, the first part including the first contact region, and the second part including the second contact region, and no direct connection existing within the contact layer from the first contact region to the second contact region, and the resistive layer being in contact with the first and second parts of the contact layer.
公开/授权文献
- US08080797B2 Bolometer and method of producing a bolometer 公开/授权日:2011-12-20
信息查询
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