发明申请
- 专利标题: NON-VOLATILE MEMORY DEVICE, MEMORY CARD AND SYSTEM
- 专利标题(中): 非易失性存储器件,存储卡和系统
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申请号: US12476574申请日: 2009-06-02
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公开(公告)号: US20090321810A1公开(公告)日: 2009-12-31
- 发明人: Min-Kyung RYU , Byong-sun JU , Myoung-bum LEE , Seung-hyun LIM , Sung-hae LEE , Young-sun KIM
- 申请人: Min-Kyung RYU , Byong-sun JU , Myoung-bum LEE , Seung-hyun LIM , Sung-hae LEE , Young-sun KIM
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2008-0060230 20080625
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L29/792
摘要:
Provided is a non-volatile memory device including; a substrate having source/drain regions and a channel region between the source/drain regions; a tunneling insulating layer formed in the channel region of the substrate; a charge storage layer formed on the tunneling insulating layer; a blocking insulating layer formed on the charge storage layer, and comprising a silicon oxide layer and a high-k dielectric layer sequentially formed; and a control gate formed on the blocking insulating layer, wherein an equivalent oxide thickness of the silicon oxide layer is equal to or greater than that of the high-k dielectric layer.
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