发明申请
- 专利标题: Thin film magnetic head, magnetic head slider, head gimbal assembly, head arm assembly, magnetic disk device and method of manufacturing thin film magnetic head
- 专利标题(中): 薄膜磁头,磁头滑块,头万向架组件,头臂组件,磁盘装置及制造薄膜磁头的方法
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申请号: US12216162申请日: 2008-06-30
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公开(公告)号: US20090323222A1公开(公告)日: 2009-12-31
- 发明人: Kei Hirata , Kazuki Sato , Yohei Koyanagi , Takayasu Kanaya , Takeo Kagami
- 申请人: Kei Hirata , Kazuki Sato , Yohei Koyanagi , Takayasu Kanaya , Takeo Kagami
- 申请人地址: JP TOKYO
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP TOKYO
- 主分类号: G11B5/48
- IPC分类号: G11B5/48 ; G11B5/33
摘要:
In manufacturing the thin film magnetic head, the rear end face of the MR element and the rear end face of a resistive film pattern are determined with high precision using a mask pattern, in which a first opening and a second opening are collectively formed. The first and second openings are located side by side in a track-width direction. The first opening includes a first edge extending across the MR film in the track-width direction, and the second opening includes a second edge located at a given interval, as measured in a direction orthogonal to the track-width direction, from the first edge, and extending in the track-width direction. In the step of polishing for forming a magnetic-recording-medium-facing-surface, the amount of polishing is determined by monitoring the resistance change of the resistive film pattern, thereby reducing the dimension errors in the MR height when manufacturing the MR element.
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