发明申请
US20100001371A1 SEMICONDUCTOR DEVICE HAVING CAPACITOR INCLUDING A HIGH DIELECTRIC FILM AND MANUFACTURE METHOD OF THE SAME
审中-公开
具有包括高介电膜的电容器的半导体器件及其制造方法
- 专利标题: SEMICONDUCTOR DEVICE HAVING CAPACITOR INCLUDING A HIGH DIELECTRIC FILM AND MANUFACTURE METHOD OF THE SAME
- 专利标题(中): 具有包括高介电膜的电容器的半导体器件及其制造方法
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申请号: US12328843申请日: 2008-12-05
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公开(公告)号: US20100001371A1公开(公告)日: 2010-01-07
- 发明人: Tatsuya SUZUKI , Yoshikazu FUJIMORI , Tsuyoshi FUJII
- 申请人: Tatsuya SUZUKI , Yoshikazu FUJIMORI , Tsuyoshi FUJII
- 申请人地址: JP Kyoto-fu
- 专利权人: ROHM CO., LTD.
- 当前专利权人: ROHM CO., LTD.
- 当前专利权人地址: JP Kyoto-fu
- 优先权: JPP2007-314691 20071205
- 主分类号: H01L29/92
- IPC分类号: H01L29/92 ; H01L21/02
摘要:
A semiconductor device includes a substrate, a plurality of lower electrodes arranged on the substrate, a high dielectric film disposed continuously on the plurality of lower electrodes, and an upper electrode disposed on the high dielectric film.
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