发明申请
US20100003778A1 METHOD OF MANUFACTURING SEMICONDUCTOR LASER 审中-公开
制造半导体激光的方法

METHOD OF MANUFACTURING SEMICONDUCTOR LASER
摘要:
A method of manufacturing a semiconductor laser includes sequentially forming a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer on top of one another on a semiconductor substrate; forming a ridge in the second conductivity type semiconductor layer; forming a first insulating film on the second conductivity type semiconductor layer at a first temperature; forming a second insulating film on the first insulating film at a second temperature, lower than the first temperature; and forming an electrode on the second insulating film.
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