发明申请
US20100009611A1 METHOD FOR MANUFACTURING A POLISHING PAD 审中-公开
制造抛光垫的方法

METHOD FOR MANUFACTURING A POLISHING PAD
摘要:
A method for inexpensively and easily manufacturing a polishing pad of excellent durability and polishing speed stability includes preparing a cell dispersed urethane composition by mechanical foaming, applying the cell dispersed urethane composition onto a base material layer, forming a polyurethane foamed layer having roughly spherical interconnected cells by curing the cell dispersed urethane composition, and regulating the thickness of the polyurethane foamed layer uniformly.
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