发明申请
- 专利标题: LIGHT EMITTING DEVICE AND FABRICATION METHOD THEREOF
- 专利标题(中): 发光装置及其制造方法
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申请号: US12518846申请日: 2007-12-12
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公开(公告)号: US20100012969A1公开(公告)日: 2010-01-21
- 发明人: Yeo Jin Yoon , Chang Yeon Kim
- 申请人: Yeo Jin Yoon , Chang Yeon Kim
- 申请人地址: KR Ansan-si
- 专利权人: Seoul Opto Device Co., Ltd.
- 当前专利权人: Seoul Opto Device Co., Ltd.
- 当前专利权人地址: KR Ansan-si
- 优先权: KR10-2006-0136681 20061228; KR10-2006-0136682 20061228; KR10-2006-0136683 20061228
- 国际申请: PCT/KR2007/006463 WO 20071212
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/302 ; H01L21/28
摘要:
There is provided a method of fabricating a vertical light emitting diode. The method comprises the steps of: growing a low doped first conductive semiconductor layer on a sacrificial substrate; forming an aluminum layer on the low doped first conductive semiconductor layer; forming an AAO layer having a large number of holes formed therein by performing anodizing treatment of the aluminum layer; etching and patterning the low doped first conductive semiconductor layer using the aluminum layer with a large number of the holes as a shadow mask to expose a portion of the low doped first conductive semiconductor layer, thereby forming a large number of grooves; removing the aluminum layer remaining on the low doped first conductive semiconductor layer; sequentially forming a high doped first conductive semiconductor layer, an active layer and a second conductive semiconductor layer on the low doped first conductive semiconductor layer with a large number of the grooves; forming a metal reflective layer and a conductive substrate on the second conductive semiconductor layer; separating the sacrificial substrate; and forming an electrode pad on the other surface of the low doped first conductive semiconductor layer, the electrode pad being filled in a large number of the grooves to be in ohmic contact with the high doped first conductive semiconductor layer
公开/授权文献
- US08053789B2 Light emitting device and fabrication method thereof 公开/授权日:2011-11-08
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