发明申请
- 专利标题: POLISHING PAD
- 专利标题(中): 抛光垫
-
申请号: US12439135申请日: 2007-08-22
-
公开(公告)号: US20100015893A1公开(公告)日: 2010-01-21
- 发明人: Atsushi Kazuno , Tetsuo Shimomura , Yoshiyuki Nakai , Kazuyuki Ogawa , Tsuyoshi Kimura
- 申请人: Atsushi Kazuno , Tetsuo Shimomura , Yoshiyuki Nakai , Kazuyuki Ogawa , Tsuyoshi Kimura
- 申请人地址: JP Osaka-shi
- 专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人地址: JP Osaka-shi
- 优先权: JP2006-235978 20060831
- 国际申请: PCT/JP2007/066288 WO 20070822
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; C08G18/10 ; C08G18/82
摘要:
An object of the invention is to provide a polishing pad having excellent planarization performance and wear resistance and to provide a method for manufacture thereof. The invention is directed to a polishing pad including a polishing layer including a polyurethane foam having fine cells, wherein the polyurethane foam is a cured product of a reaction of (1) an isocyanate-terminated prepolymer (A) that is capable of reacting with 4,4′-methylenebis(o-chloroaniline) to form a non-foamed polyurethane having a tan δ peak temperature of 100° C. or more, (2) an isocyanate-terminated prepolymer (B) that is capable of reacting with 4,4′-methylenebis(o-chloroaniline) to form a non-foamed polyurethane having a tan δ peak temperature of 40° C. or less, and (3) 4,4′-methylenebis(o-chloroaniline), and the isocyanate-terminated prepolymers (A) and (B) are mixed in an (A)/(B) ratio of 50/50 to 90/10 (by wt %).
公开/授权文献
- US08303372B2 Polishing pad 公开/授权日:2012-11-06
信息查询