发明申请
US20100018028A1 RELEASE LAYER FOR PERMANENT MASTER FOR PATTERNED MEDIA MANUFACTURING 有权
释放用于图形介质制造的永久主板

RELEASE LAYER FOR PERMANENT MASTER FOR PATTERNED MEDIA MANUFACTURING
摘要:
The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
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