发明申请
- 专利标题: RELEASE LAYER FOR PERMANENT MASTER FOR PATTERNED MEDIA MANUFACTURING
- 专利标题(中): 释放用于图形介质制造的永久主板
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申请号: US12178416申请日: 2008-07-23
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公开(公告)号: US20100018028A1公开(公告)日: 2010-01-28
- 发明人: Gennady Gauzner , Nobuo Kurataka , Dieter Klaus Weller , Christopher Joseph Formato
- 申请人: Gennady Gauzner , Nobuo Kurataka , Dieter Klaus Weller , Christopher Joseph Formato
- 申请人地址: US CA Scotts Valley
- 专利权人: Seagate Technology LLC
- 当前专利权人: Seagate Technology LLC
- 当前专利权人地址: US CA Scotts Valley
- 主分类号: B23P17/00
- IPC分类号: B23P17/00
摘要:
The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
公开/授权文献
- US08312609B2 Method of manufacturing a patterned media stamper 公开/授权日:2012-11-20