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公开(公告)号：US09278857B2
公开(公告)日：2016-03-08
申请号：US13362972
申请日：2012-01-31
申请人： Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
发明人： Sang-Min Park , Nobuo Kurataka , Gennady Gauzner
CPC分类号： B05D3/12 , B05D1/26 , B05D3/10 , B29C33/62 , B29C59/022 , B29C59/026 , B29C2059/023 , B29K2883/00 , B29K2909/14 , B29L2009/005 , B29L2031/756 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24802
摘要： The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.
摘要翻译： 实施方案公开了一种表面张力控制方法，以减少压印中的捕获的气泡，包括改变压印模板和基材的界面表面的化学方面以改变表面张力，区分界面表面张力以控制预处理的界面流动速率， 固化液体抗蚀剂并控制预固化液体抵抗界面流速以减少捕获气体并防止固化的印迹抗蚀剂中的捕获气泡缺陷。
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公开(公告)号：US08312609B2
公开(公告)日：2012-11-20
申请号：US12178416
申请日：2008-07-23
CPC分类号： G11B5/855 , G11B5/865 , Y10T29/49021 , Y10T29/49812 , Y10T29/49815 , Y10T29/49885 , Y10T29/49982
摘要： The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
摘要翻译： 本发明涉及一种制造图案化介质Ni压模的方法，其包括沉积全氟癸基三氯硅烷释放层。 释放层消除了主压模界面处的接合。 还提供了用于制造图案化的介质压模的永久性主体。
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公开(公告)号：US20080093336A1
公开(公告)日：2008-04-24
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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公开(公告)号：US06838227B2
公开(公告)日：2005-01-04
申请号：US10112214
申请日：2002-03-29
申请人： HongYing Wang , Neil Deeman , Koichi Wago , Nobuo Kurataka
发明人： HongYing Wang , Neil Deeman , Koichi Wago , Nobuo Kurataka
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/732 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , Y10S428/90 , Y10T428/249921 , Y10T428/31678
摘要： A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.
摘要翻译： 公开了一种用于在磁性介质上形成伺服图案的系统和方法。 涂覆有聚苯乙烯层的磁性薄膜上印有镍压模，其在聚苯乙烯上再现印模图案的负像。 离子然后被加速到聚苯乙烯的表面，聚苯乙烯的表面阻止聚苯乙烯厚的区域中的离子，并允许离子穿透到聚苯乙烯薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这再现了磁性层上的冲压聚苯乙烯图案。 然后通过氧等离子体蚀刻除去聚苯乙烯，留下图案化的磁性介质。
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公开(公告)号：US06658922B2
公开(公告)日：2003-12-09
申请号：US09996552
申请日：2001-11-27
申请人： Joseph Leigh , David S. Kuo , Li-Ping Wang , Nobuo Kurataka
发明人： Joseph Leigh , David S. Kuo , Li-Ping Wang , Nobuo Kurataka
IPC分类号： G01B528
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/012 , G11B2005/001 , Y10S977/872
摘要： A method and apparatus for scanning a media is described. More particularly, polarization detector and an atomic force microscope are coupled to a common platform indexed to a spindle. Optionally, an optical microscope may be coupled to the common platform. The polarization detector is used to detect a magnetic image, such as at least a portion of a servo pattern, of the media, and the atomic force microscope, which may be aligned using the magnetic image, is used with a magnetic microscopy module to scan the media. Accordingly, magnetic imagery may be achieved with indexing to a single spindle for positional consistency as between equipment. Moreover, the polarization detector may further be configured to detect scattered light for providing topographic imagery of the media.
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公开(公告)号：US08619528B2
公开(公告)日：2013-12-31
申请号：US13223199
申请日：2011-08-31
申请人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
发明人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
IPC分类号： G11B20/00
CPC分类号： G06K5/00 , G11B5/746 , G11B5/82 , G11B5/84 , G11B5/855 , G11B20/182 , G11B27/36 , G11B2220/2516
摘要： A system and method of calibrating optical measuring equipment includes optically measuring discrete objects of a first known predictable pattern from a calibration apparatus, wherein the first known predictable pattern is a bit pattern. A recording surface optical reader is calibrated based on the optically measuring. Using the first known predictable pattern, contamination is filtered from the results of the optically measuring.
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公开(公告)号：US07378028B2
公开(公告)日：2008-05-27
申请号：US10859202
申请日：2004-06-03
申请人： Koichi Wago , HongYing Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
发明人： Koichi Wago , HongYing Wang , Nobuo Kurataka , Gennady Gauzner , Neil Deeman
IPC分类号： G11B11/00
CPC分类号： G11B5/855 , Y10T428/24802
摘要： A method of fabricating a patterned magnetic layer comprises sequential steps of:(a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material;(b) forming a layer of a mask material on the layer of non-magnetic material;(c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material;(d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material;(e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and(f) removing the topographically patterned layer of mask material.
摘要翻译： 制造图案化磁性层的方法包括以下顺序的步骤：（a）提供包括非磁性衬底的工件，覆盖在衬底表面上的一层磁性材料，以及覆盖该层的非磁性材料层 的磁性材料; （b）在非磁性材料层上形成掩模材料层; （c）在所述掩模材料层中形成包括多个凹部的形貌图案; （d）选择性地去除所述凹陷的下部附近的非磁性材料层的部分，从而暴露所述磁性材料层的选定部分; （e）用液体处理磁性材料层的暴露部分以降低其磁特性; 和（f）去除掩模材料的地形图案层。
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8.发明授权Dry passivation process for stamper/imprinter family making for patterned recording media 有权干式钝化工艺用于压模/印刷机家族制作图案化记录介质公开(公告)号：US07150844B2
公开(公告)日：2006-12-19
申请号：US10685462
申请日：2003-10-16
摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.
摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法包括以下步骤：（a）提供基板/工件，该基板/工件包括地形图形表面，其包括对应于待形成的图案的多个凸起和凹陷 记录介质的表面; （b）通过干法形成与地形图形表面保形接触的薄释放层; （c）在地形图形表面上形成与薄钝化层保形接触的材料的较厚层; 以及（d）将厚层材料与地形图案化的表面分离以形成压模/打印机，其包括具有地形图形表面的负图像复制品的压印表面，较厚的材料层与地形图形表面的分离是 由通过干法形成的薄释放层促进。
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9.发明授权Defect-free magnetic stampers/imprinters for contact patterning of magnetic media 失效用于磁性介质接触图形化的无缺陷磁性冲压机/冲孔机公开(公告)号：US06761618B1
公开(公告)日：2004-07-13
申请号：US10386600
申请日：2003-03-13
申请人： Joseph Leigh , Nobuo Kurataka
发明人： Joseph Leigh , Nobuo Kurataka
IPC分类号： B24B4900
CPC分类号： G11B11/10582 , B24B37/30 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/855 , G11B5/865
摘要： A method of manufacturing a magnetic stamper/imprinter for use in patterning of magnetic recording media by means of a contact printing process, comprising sequential steps of: (a) providing a stamper/imprinter comprising a body of a magnetic material having an imprinting surface including a topographical pattern corresponding to a pattern to be formed in the surface of a magnetic or magneto-optical (MO) recording medium and comprising a patterned plurality of spaced-apart recesses with a plurality of non-recessed areas therebetween, said imprinting surface including a plurality of defects comprising surface blemishes and stains, magnetic particles, and non-magnetic particles; (b) initially removing the surface blemishes, stains, and magnetic particles; and (c) then removing or rendering the non-magnetic particles benign to the contact printing process.
摘要翻译： 一种用于通过接触印刷方法制造用于磁记录介质图案化的磁压模/打印机的方法，包括以下顺序步骤：（a）提供压模/打印机，其包括具有压印表面的磁性材料体，包括： 与形成在磁或磁光（MO）记录介质的表面中的图案相对应的图案图案，并且包括在其间具有多个非凹陷区域的图案化的多个间隔开的凹槽，所述压印表面包括 多个缺陷包括表面瑕疵和污渍，磁性颗粒和非磁性颗粒;（b）最初除去表面瑕疵，污渍和磁性颗粒; 和（c）然后将非磁性颗粒除去或呈现良好的接触印刷过程。
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公开(公告)号：US5798164A
公开(公告)日：1998-08-25
申请号：US503785
申请日：1995-07-18
申请人： Joel R. Weiss , Koji Shima , Joseph Leigh , Hiroshi Konishi , Nobuo Kurataka , Hiroki Hara , Naoki Inoue
发明人： Joel R. Weiss , Koji Shima , Joseph Leigh , Hiroshi Konishi , Nobuo Kurataka , Hiroki Hara , Naoki Inoue
CPC分类号： G11B5/8404 , B24B21/06 , G11B5/64 , G11B5/82 , Y10S428/90 , Y10T428/24355
摘要： Magnetic recording media are provided having separately textured data and read/write head landing zones. Separating these zones on the recording surface allows independent optimization of the topology to maximize both recording characteristics and mechanical durability. The landing or contact start stop zone has an average surface roughness greater than that of the data zone. Preferably, a transition zone extends between the contact start stop zone and the data zone, the transition zone varying between the two in average surface roughness. Preferably, the contact start stop zone is textured first, followed by the data zone, thereby ensuring uniform stiction performance. Texture machines for producing such zone texturing and texturing methods are also provided.
摘要翻译： 磁记录介质具有单独纹理的数据和读/写磁头着陆区。 在记录表面上分离这些区域可以独立优化拓扑结构，以最大化记录特性和机械耐久性。 着陆或接触起始停止区域的平均表面粗糙度大于数据区域的平均表面粗糙度。 优选地，过渡区域在接触起始停止区域和数据区域之间延伸，过渡区域在两个平均表面粗糙度之间变化。 优选地，接触起始停止区先纹理，然后是数据区，从而确保均匀的静摩擦性能。 还提供了用于生产这种区域纹理和纹理方法的纹理机。
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