发明申请
- 专利标题： Aluminum Inks and Methods of Making the Same, Methods for Depositing Aluminum Inks, and Films Formed by Printing and/or Depositing an Aluminum Ink
- 专利标题（中）： 铝油墨及其制造方法，铝油墨的沉积方法和铝墨印刷和/或沉积形成的薄膜
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申请号： US12509351申请日： 2009-07-24
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公开(公告)号： US20100022078A1公开(公告)日： 2010-01-28
- 发明人: Joerg ROCKENBERGER , Fabio Zürcher , Wenzhuo Guo
- 申请人： Joerg ROCKENBERGER , Fabio Zürcher , Wenzhuo Guo
- 主分类号： H01L21/28
- IPC分类号： H01L21/28 ; C09D11/00 ; B05D5/12 ; H01L21/3205
摘要：
Aluminum metal ink compositions, methods of forming such compositions, and methods of forming aluminum metal layers and/or patterns are disclosed. The ink composition includes an aluminum metal precursor and an organic solvent. Conductive structures may be made using such ink compositions by printing or coating the aluminum precursor ink on a substrate (decomposing the aluminum metal precursors in the ink) and curing the composition. The present aluminum precursor inks provide aluminum films having high conductivity, and reduce the number of inks and printing steps needed to fabricate printed, integrated circuits.
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