发明申请
US20100024554A1 TRIAXIAL ACCELERATION SENSOR 有权
三相加速传感器

  • 专利标题: TRIAXIAL ACCELERATION SENSOR
  • 专利标题(中): 三相加速传感器
  • 申请号: US12505116
    申请日: 2009-07-17
  • 公开(公告)号: US20100024554A1
    公开(公告)日: 2010-02-04
  • 发明人: Johannes ClassenLars Tebje
  • 申请人: Johannes ClassenLars Tebje
  • 优先权: DE102008040855.7 20080730
  • 主分类号: G01P15/125
  • IPC分类号: G01P15/125
TRIAXIAL ACCELERATION SENSOR
摘要:
An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.
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