发明申请
- 专利标题: TRIAXIAL ACCELERATION SENSOR
- 专利标题(中): 三相加速传感器
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申请号: US12505116申请日: 2009-07-17
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公开(公告)号: US20100024554A1公开(公告)日: 2010-02-04
- 发明人: Johannes Classen , Lars Tebje
- 申请人: Johannes Classen , Lars Tebje
- 优先权: DE102008040855.7 20080730
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.
公开/授权文献
- US08333113B2 Triaxial acceleration sensor 公开/授权日:2012-12-18
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