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公开(公告)号：US08915138B2
公开(公告)日：2014-12-23
申请号：US13450901
申请日：2012-04-19
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0831
摘要： An inertial sensor, comprising a substrate and a rocker that is connected to the substrate via a spring apparatus, the spring apparatus having at least two springs for suspending the rocker on the substrate, the two springs being disposed with an offset from one another with reference to their longitudinal axis.
摘要翻译： 一种惯性传感器，包括通过弹簧装置连接到基板的基板和摇杆，该弹簧装置具有至少两个用于将摇臂悬挂在基板上的弹簧，两个弹簧以参考的方式彼此偏移地设置 到它们的纵轴。
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公开(公告)号：US08393215B2
公开(公告)日：2013-03-12
申请号：US12468501
申请日：2009-05-19
申请人： Heiko Stahl , Dietrich Schubert , Lars Tebje
发明人： Heiko Stahl , Dietrich Schubert , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A micromechanical acceleration sensor having a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, in which the seismic mass is suspended over the substrate with the help of the suspension, the seismic mass has a mass center of gravity, the suspension has at least two anchors on the substrate, the two anchors are situated on opposite sides of the mass center of gravity, the distance between the two anchors being small compared to a horizontal extension of the seismic mass, the two anchors determine a central axis, the seismic mass have recesses which are situated on opposite sides of the central axis and are laterally open outward on the sides facing away from the central axis, and the stationary electrodes at least engage in the recesses of the seismic mass.
摘要翻译： 一种微机械加速度传感器，具有基板，悬架，抗震块和静止电容电极，其中借助于悬架将地震质量块悬挂在基板上，地震块具有质量重心，悬架具有 在基板上的至少两个锚固件，两个锚固件位于质量重心的相对侧上，两个锚固件之间的距离与地震块的水平延伸部分相比较小，两个锚固件确定中心轴线， 地震质量具有位于中心轴线的相对侧上的凹槽，并且在背离中心轴线的侧面上向外侧向开放，并且固定电极至少与地震块的凹部啮合。
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公开(公告)号：US08272268B2
公开(公告)日：2012-09-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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4.发明申请公开(公告)号：US20110154899A1
公开(公告)日：2011-06-30
申请号：US12736609
申请日：2009-04-01
申请人： Johannes Classen , Lars Tebje
发明人： Johannes Classen , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0817 , G01P2015/0831
摘要： A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.
摘要翻译： 一种微机械部件，包括基板，地震块以及第一和第二检测装置，所述基板具有主延伸平面，并且所述第一检测装置被提供用于检测所述地震块沿着基本平行的第一方向的基本平移的第一偏转 并且第二检测装置还被设置用于检测围绕平行于基本上垂直于主延伸平面的第二方向的第一旋转轴线的地震质量的基本上旋转的第二偏转。 地震质量可以被体现为不对称的摇杆，结果可以将加速度感测为旋转。 可以通过电容式传感器进行检测。
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5.发明授权公开(公告)号：US07878061B2
公开(公告)日：2011-02-01
申请号：US12323653
申请日：2008-11-26
IPC分类号： H01L21/76
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US20080141774A1
公开(公告)日：2008-06-19
申请号：US11985254
申请日：2007-11-13
申请人： Johannes Classen , Markus Heitz , Lars Tebje , Fouad Bennini
发明人： Johannes Classen , Markus Heitz , Lars Tebje , Fouad Bennini
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.
摘要翻译： 加速度传感器包括悬挂在基板上方的弹簧上并且可以在垂直于基板的表面的方向上偏转的地震质量。 为了减少由于干扰加速度导致的地震质体沿着衬底表面的偏转，这导致了垂直于衬底表面的地震质量偏转测量的伪造，弹簧包括两个弯曲杆 通过横档相互连接。
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公开(公告)号：US08796791B2
公开(公告)日：2014-08-05
申请号：US13888920
申请日：2013-05-07
申请人： Axel Franke , Patrick Wellner , Lars Tebje
发明人： Axel Franke , Patrick Wellner , Lars Tebje
IPC分类号： G01P15/08
CPC分类号： B81B3/0075 , B81C1/00626 , B81C1/00674 , B81C2201/0112 , B81C2201/014 , B81C2203/0109
摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.
摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。
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公开(公告)号：US08333113B2
公开(公告)日：2012-12-18
申请号：US12505116
申请日：2009-07-17
申请人： Johannes Classen , Lars Tebje
发明人： Johannes Classen , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0814 , G01P2015/0831
摘要： An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.
摘要翻译： 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。
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公开(公告)号：US20100043549A1
公开(公告)日：2010-02-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/10
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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公开(公告)号：US20100024554A1
公开(公告)日：2010-02-04
申请号：US12505116
申请日：2009-07-17
申请人： Johannes Classen , Lars Tebje
发明人： Johannes Classen , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/0814 , G01P2015/0831
摘要： An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.
摘要翻译： 加速度传感器包括基板和第一质量元件，第一质量元件以与第一质量元件绕轴线旋转的方式连接到基板，第一质量元件以第二质量元件连接到第二质量元件， 第二质量元件可以沿着平行于轴线的第一方向移动，并且第一质量元件以与第三质量元件垂直的轴线可移动的方式连接到第三质量元件。
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