发明申请
- 专利标题： MICROMECHANICAL RESONATING DEVICES AND RELATED METHODS
- 专利标题（中）： 微机械共振装置及相关方法
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申请号： US12181531申请日： 2008-07-29
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公开(公告)号： US20100026136A1公开(公告)日： 2010-02-04
- 发明人: Alexei Gaidarzhy , Pritiraj Mohanty
- 申请人： Alexei Gaidarzhy , Pritiraj Mohanty
- 申请人地址： US MA Boston
- 专利权人： Sand9, Inc
- 当前专利权人： Sand9, Inc
- 当前专利权人地址： US MA Boston
- 主分类号： H02N11/00
- IPC分类号： H02N11/00
摘要：
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
公开/授权文献
- US08111108B2 Micromechanical resonating devices and related methods 公开/授权日：2012-02-07
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