发明申请
- 专利标题： METHODS FOR REAL-TIME CONTAMINATION, ENVIRONMENTAL, OR PHYSICAL MONITORING OF A PHOTOMASK
- 专利标题（中）： 实时污染，环境或物理监测方法
-
申请号： US12182668申请日： 2008-07-30
-
公开(公告)号： US20100029021A1公开(公告)日： 2010-02-04
- 发明人: Brent A. Anderson , Robert K. Leidy , Jed H. Rankin
- 申请人： Brent A. Anderson , Robert K. Leidy , Jed H. Rankin
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
Methods for real-time contamination, environmental, or physical monitoring of a photomask. An attribute of a photomask is monitored using a sensor of an electronics package attached to the photomask. The methods further include generating one or more sensor signals relating to the monitored attribute with the sensor and transmitting the one or more sensor signals from the electronics package to a control system.
公开/授权文献
信息查询
IPC分类:
