Invention Application
- Patent Title: MASKLESS NANOFABRICATION OF ELECTRONIC COMPONENTS
- Patent Title (中): 电子元件的MASKING NANOFABRICATION
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Application No.: US11478294Application Date: 2006-06-29
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Publication No.: US20100035375A1Publication Date: 2010-02-11
- Inventor: Constantine P. Grigoropoulos , Seung-Hwan Ko , Jaewon Chung , Dimos Poulikakos , Heng Pan
- Applicant: Constantine P. Grigoropoulos , Seung-Hwan Ko , Jaewon Chung , Dimos Poulikakos , Heng Pan
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California,Eidgenossische Technische Hochschule Zurich
- Current Assignee: The Regents of the University of California,Eidgenossische Technische Hochschule Zurich
- Current Assignee Address: US CA Oakland
- Main IPC: H01L51/40
- IPC: H01L51/40 ; B05D5/12 ; B05D3/06 ; H01L51/10 ; B05C11/00 ; H01L29/15 ; H01G4/00 ; H05K1/18
Abstract:
The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.
Public/Granted literature
- US07682970B2 Maskless nanofabrication of electronic components Public/Granted day:2010-03-23
Information query
IPC分类:
