发明申请
- 专利标题： Method and Apparatus for a Micromachined Multisensor
- 专利标题（中）： 微加工多传感器的方法和装置
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申请号： US12194288申请日： 2008-08-19
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公开(公告)号： US20100043551A1公开(公告)日： 2010-02-25
- 发明人: John A. Geen , Jinbo Kuang , Vineet Kumar
- 申请人： John A. Geen , Jinbo Kuang , Vineet Kumar
- 申请人地址： US MA Norwood
- 专利权人： ANALOG DEVICES, INC.
- 当前专利权人： ANALOG DEVICES, INC.
- 当前专利权人地址： US MA Norwood
- 主分类号： G01R27/26
- IPC分类号： G01R27/26 ; G01P15/125 ; G01P15/00
摘要：
In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.
公开/授权文献
- US07980133B2 Method and apparatus for a micromachined multisensor 公开/授权日：2011-07-19
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