发明申请
US20100044708A1 THIN FILM TRANSISTOR, PIXEL STRUCTURE AND FABRICATION METHODS THEREOF
审中-公开
薄膜晶体管,像素结构及其制造方法
- 专利标题: THIN FILM TRANSISTOR, PIXEL STRUCTURE AND FABRICATION METHODS THEREOF
- 专利标题(中): 薄膜晶体管,像素结构及其制造方法
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申请号: US12258459申请日: 2008-10-27
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公开(公告)号: US20100044708A1公开(公告)日: 2010-02-25
- 发明人: Heng-Chang Lin , Chun-Jen Ma , Yi-Ling Hung , Teng-Yuan Hsu
- 申请人: Heng-Chang Lin , Chun-Jen Ma , Yi-Ling Hung , Teng-Yuan Hsu
- 申请人地址: TW Taoyuan
- 专利权人: CHUNGHWA PICTURE TUBES, LTD.
- 当前专利权人: CHUNGHWA PICTURE TUBES, LTD.
- 当前专利权人地址: TW Taoyuan
- 优先权: TW97131642 20080819
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L21/00
摘要:
A fabrication method of a thin film transistor includes providing a substrate at first. Thereafter, a first gate is formed on the substrate. An insulator is then formed to cover the first gate and a portion of the substrate. After that, a channel structure is formed on the insulator above the first gate. In addition, a metal layer is formed to cover the channel structure and a portion of the insulator. Next, the metal layer is patterned, and at least the metal layer on two sidewalls of the channel structure is retained to form a source and a drain, respectively. Moreover, a passivation layer is formed to at least cover the source, the drain and a portion of the insulator.
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