发明申请
- 专利标题: CHARGED PARTICLE BEAM APPARATUS
- 专利标题(中): 充电颗粒光束装置
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申请号: US12615955申请日: 2009-11-10
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公开(公告)号: US20100051806A1公开(公告)日: 2010-03-04
- 发明人: Yuko Sasaki , Yasuhiro Gunji , Zhaohui Cheng
- 申请人: Yuko Sasaki , Yasuhiro Gunji , Zhaohui Cheng
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-367153 20041220
- 主分类号: G01N23/225
- IPC分类号: G01N23/225
摘要:
A charged particle beam apparatus is provided which has high resolving power and a wide scanning region (observation field of view). The apparatus has a unit for adjusting the focus, a unit for adjusting astigmatism, a unit for controlling and detecting scanning positions and a controller operative to control the focus adjustment and astigmatism adjustment at a time in interlocked relation to the scanning positions, thereby assuring compatibility between the high resolving power and the observation view field of a wide area.
公开/授权文献
- US08207513B2 Charged particle beam apparatus 公开/授权日:2012-06-26