发明申请
- 专利标题: Method Of Synthesizing Semiconductor Nanostructures And Nanostructures Synthesized By The Method
- 专利标题(中): 合成半导体纳米结构和纳米结构的方法
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申请号: US12440233申请日: 2007-04-05
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公开(公告)号: US20100065810A1公开(公告)日: 2010-03-18
- 发明人: Ulrich Goesele , Stephan Senz , Volker Schmidt , Yewu Wang
- 申请人: Ulrich Goesele , Stephan Senz , Volker Schmidt , Yewu Wang
- 申请人地址: DE Munechen
- 专利权人: Max-Planck-Gessellschaft zur Foerderung der Wissenschaften e.V.
- 当前专利权人: Max-Planck-Gessellschaft zur Foerderung der Wissenschaften e.V.
- 当前专利权人地址: DE Munechen
- 优先权: EP06018800.0 20060907
- 国际申请: PCT/EP07/03120 WO 20070405
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/20
摘要:
A method of synthesizing semiconductor nanostructures of at least one semiconductor material (e.g. nanowires, nanorods, nanoribbons, nanodots, quantumdots, etc.) is described which includes the steps of placing a solid catalyst particle on a substrate, placing the combination of the said substrate and the said solid catalyst in a chamber of low oxygen partial pressure, below I×10−2 mbar, adding one or more gaseous reactants comprising at least one of said semiconductor material and a suitable precursor therefor and heating the said combination to a temperature above 200° C. but below the melting point of the solid catalyst particle. Nanostructures made by the method are also claimed.
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