发明申请
- 专利标题: NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US12534576申请日: 2009-08-03
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公开(公告)号: US20100072538A1公开(公告)日: 2010-03-25
- 发明人: Masaru KITO , Yoshiaki FUKUZUMI , Ryota KATSUMATA , Masaru KIDOH , Hiroyasu TANAKA , Megumi ISHIDUKI , Yosuke KOMORI , Hideaki AOCHI
- 申请人: Masaru KITO , Yoshiaki FUKUZUMI , Ryota KATSUMATA , Masaru KIDOH , Hiroyasu TANAKA , Megumi ISHIDUKI , Yosuke KOMORI , Hideaki AOCHI
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-245070 20080925
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8246
摘要:
A nonvolatile semiconductor memory device includes a plurality of memory strings, each of which has a plurality of electrically rewritable memory cells connected in series; and select transistors, one of which is connected to each of ends of each of the memory strings. Each of the memory strings is provided with a first semiconductor layer having a pair of columnar portions extending in a perpendicular direction with respect to a substrate, and a joining portion formed so as to join lower ends of the pair of columnar portions; a charge storage layer formed so as to surround a side surface of the columnar portions; and a first conductive layer formed so as to surround the side surface of the columnar portions and the charge storage layer, and configured to function as a control electrode of the memory cells. Each of the select transistors is provided with a second semiconductor layer extending upwardly from an upper surface of the columnar portions; and a second conductive layer formed so as to surround a side surface of the second semiconductor layer with a gap interposed, and configured to function as a control electrode of the select transistors.
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