Invention Application
US20100073652A1 MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
有权
可移动身体装置，可移动身体驱动方法，曝光装置，曝光方法和装置制造方法
- Patent Title: MOVABLE BODY APPARATUS, MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Patent Title (中): 可移动身体装置，可移动身体驱动方法，曝光装置，曝光方法和装置制造方法
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Application No.: US12561480Application Date: 2009-09-17
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Publication No.: US20100073652A1Publication Date: 2010-03-25
- Inventor: Yuichi SHIBAZAKI
- Applicant: Yuichi SHIBAZAKI
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2009-121821 20090520
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/58
Abstract:
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body. In this case, because a configuration in which the arm member irradiates a measurement beam on the grating is employed, there is no adverse effect due to the drive of the moving body, unlike the case when an encoder system is arranged on a stage surface plate. Accordingly, it becomes possible to drive the movable body with good precision.
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