公开(公告)号：US20120127453A1

公开(公告)日：2012-05-24

申请号：US13363079

申请日：2012-01-31

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/58 ,  G03B27/32

CPC classification number: G03F7/70775 ,  G01B21/042 ,  G03F7/70341 ,  G03F7/70483 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70975 ,  G03F9/70 ,  G03F9/7046 ,  G03F9/7049 ,  H01L21/68 ,  H01L21/681 ,  Y10T29/49002

Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

Abstract translation: 控制器使用至少包括编码器系统的X编码器和Y编码器中的每一个的三个编码器来测量XY平面内的台的位置信息，并且基于测量结果，在XY平面中驱动该平台 在与用于测量位置信息的头（编码器）的XY平面平行的表面中的位置信息和位置信息（p1，q1），（p2，q2）和（p3，q3）。 因此，在使用包括多个头的编码器系统的台架移动期间切换用于控制的头（编码器）的同时，可以高精度地控制台的移动。

公开(公告)号：US20110032496A1

公开(公告)日：2011-02-10

申请号：US12851929

申请日：2010-08-06

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/54 ,  G03B27/60 ,  G05G11/00

CPC classification number: G03F7/70866 ,  G03F7/70133 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70758 ,  G03F7/70775 ,  G03F7/70858 ,  G03F7/70933 ,  G03F7/70941 ,  Y10T74/20354

Abstract: One pair each of a Y linear motor (a total of four) on the +X side and the −X side that drive a reticle stage include one pair each of a stator section (a total of four) and three each of a mover section (a total of six) on the +X side and the −X side. In this case, the three each of the mover sections on the +X side and the −X side configure one each of a mover. The mover section located in the center in the Z-axis direction of each of the movers is used in common by each pair of the Y linear motors. Therefore, the weight of the mover section (reticle stage) of the reticle stage device is reduced, which allows a higher acceleration. Further, the mover section located in the center in the Z-axis direction of each of the movers coincides with a neutral plane of the reticle stage.

Abstract translation: + X侧的Y直线电动机（共4个）和驱动标线器平台的-X侧分别具有一个定子部（共4个）和3个各自的动子部 （共六个）在+ X侧和-X侧。 在这种情况下，+ X侧和-X侧的三个动子部分中的每一个配置一个动子。 位于每个移动体的Z轴方向中心的动子部分由每对Y线性电动机共同使用。 因此，分划板台装置的移动部（标线片台）的重量减小，这允许更高的加速度。 此外，位于每个移动体的Z轴方向中心的动子部分与标线片台的中性平面重合。

公开(公告)号：US20100296071A1

公开(公告)日：2010-11-25

申请号：US12782310

申请日：2010-05-18

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/42 ,  G02B5/18 ,  G03B27/32

CPC classification number: G03F7/70725 ,  G03F7/70775 ,  G03F7/7085

Abstract: A fine movement stage is driven by a controller, based on positional information of the fine movement stage in a measurement direction measured by a measurement system and correction information of a measurement error caused by a tilt of the fine movement stage included in the positional information. Accordingly, driving the fine movement stage with high precision becomes possible, which is not affected by a measurement error included in the positional information in a measurement direction of the measurement system that occurs due to a tilt of the fine movement stage.

Abstract translation: 基于由测量系统测量的测量方向上的精细运动级的位置信息和由位置信息中包括的微动台的倾斜引起的测量误差的校正信息，由控制器驱动精细运动级。 因此，可以高精度地进行微动作阶段的驱动，不会受到微小移动台的倾斜而导致的测量系统的测量方向上的位置信息中包含的测量误差的影响。

公开(公告)号：US20100073652A1

公开(公告)日：2010-03-25

申请号：US12561480

申请日：2009-09-17

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/42 ,  G03B27/58

CPC classification number: G03F7/70716 ,  G03F7/707 ,  G03F7/70775

Abstract: A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body. In this case, because a configuration in which the arm member irradiates a measurement beam on the grating is employed, there is no adverse effect due to the drive of the moving body, unlike the case when an encoder system is arranged on a stage surface plate. Accordingly, it becomes possible to drive the movable body with good precision.

Abstract translation: 驱动系统基于第一测量系统的测量结果来驱动移动体，第一测量系统通过从位于平行于XY平面的表面上的来自臂构件的测量光束照射测量可移动体在XY平面中的位置 的移动体。 在这种情况下，由于采用臂部件对光栅照射测量光束的结构，与编码器系统配置在台面板上的情况不同，不会由于移动体的驱动而产生不利影响 。 因此，能够高精度地驱动移动体。

公开(公告)号：US20090190104A1

公开(公告)日：2009-07-30

申请号：US12343751

申请日：2008-12-24

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/32 ,  G01B11/14 ,  G03B27/42 ,  G03B27/54 ,  G03B27/72

CPC classification number: G03F7/70775

Abstract: Encoder heads and Z heads are installed in order to measure the position of a stage that moves within a predetermined plane. Measurement beams emitted from these heads are irradiated to scales arranged on the upper surface of the stage. During the idling, for example, the stage continues to be moved by driving and rotating the stage around the stop position of the stage serving as the center, or the stage is withdrawn to an area to which the measurement beams are not irradiated.

Abstract translation: 为了测量在预定平面内移动的平台的位置，安装有编码器头和Z头。 从这些头发射的测量光束照射到布置在平台的上表面上的刻度上。 例如，在怠速运转期间，通过围绕作为中心的台架的停止位置的驱动和旋转台架继续移动台架，或者将台架撤回到测量光束未被照射的区域。

公开(公告)号：US20090161086A1

公开(公告)日：2009-06-25

申请号：US12332624

申请日：2008-12-11

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/42 ,  G01B11/14

CPC classification number: G01D5/34746 ,  G01D5/34723 ,  G03F7/70775

Abstract: A movable body system is equipped with a stage having a stage main section which moves along an XY plane and a stage which is finely movable in a direction (a Z-axis direction) orthogonal to the XY plane and a tilt direction with respect to the XY plane, and a measurement device which measures positional information of the stage within the XY plane. The measurement device has a plurality of encoder heads arranged on the table, and optical fibers whose end sections are arranged facing each head at the stage main section and the optical axes at the end sections are substantially parallel to the Z-axis direction, and the device measures positional information of the stage, based on an output of a head facing a grating section placed substantially parallel to the XY plane. And, air transmission of a signal is performed between each of the heads and the end section of the optical fibers.

Abstract translation: 移动体系具有台架，其具有沿着XY平面移动的台主体部和能够沿与XY平面正交的方向（Z轴方向）可微动的台和相对于该XY平面的倾斜方向 XY平面以及测量XY平面内的台的位置信息的测量装置。 测量装置具有布置在工作台上的多个编码器头，并且其末端部分在台架主体部分面对每个头部的光纤和端部部分处的光轴基本上平行于Z轴方向，并且 设备基于面向基本上平行于XY平面放置的光栅部分的头部的输出来测量平台的位置信息。 并且，在光纤的每个头部和端部之间执行信号的空气传输。

公开(公告)号：US20090051893A1

公开(公告)日：2009-02-26

申请号：US12195960

申请日：2008-08-21

Applicant: Yuichi SHIBAZAKI ,  Yuho KANAYA

Inventor： Yuichi SHIBAZAKI ,  Yuho KANAYA

IPC: G03B27/58 ,  G05B11/32 ,  G03F7/20

CPC classification number: G03F7/7085 ,  G03F7/70775 ,  G03F9/7011 ,  G03F9/7019 ,  G03F9/7026 ,  G03F9/7034

Abstract: A controller uses two Z heads, which are positioned above a reflection surface installed on the ±X ends of the upper surface of a wafer table, to measure the height and tilt of the wafer table. The Z head to be used is switched according to XY positions of the wafer table. On the switching of the heads, the controller applies a coordinate linkage method to set an initial value of the Z head which is to be newly used. Accordingly, although the Z head to be used is sequentially switched according the XY position of the wafer table, measurement results of the height and the tilt of the wafer table are stored before and after the switching, and it becomes possible to drive the wafer table with high precision.

Abstract translation: 控制器使用位于晶片台的上表面的±X端上的反射面上方的两个Z磁头来测量晶片台的高度和倾斜度。 要使用的Z头根据晶片台的XY位置进行切换。 在切换头部时，控制器应用坐标联动方法来设定要被新使用的Z头的初始值。 因此，虽然根据晶片台的XY位置顺序地切换要使用的Z头，但是在切换之前和之后存储晶片台的高度和倾斜的测量结果，并且可以驱动晶片台 精度高。

公开(公告)号：US20080202555A1

公开(公告)日：2008-08-28

申请号：US11851864

申请日：2007-09-07

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: B08B3/04 ,  B08B13/00 ,  B08B7/00 ,  B08B1/00

CPC classification number: H01L21/6875 ,  G03F7/70341 ,  G03F7/70716 ,  H01L21/67051 ,  H01L21/68735 ,  Y10T29/49

Abstract: A cleaning member is smaller than a substrate for exposure where exposure light is irradiated, and at least part of a substrate-holding member that holds a rear face of the substrate for exposure is held by the substrate-holding member in order to clean.

Abstract translation: 清洁部件小于照射曝光的曝光用基板，并且保持用于曝光的基板的背面的基板保持部件的至少一部分由基板保持部件保持以进行清洁。

公开(公告)号：US20120224158A1

公开(公告)日：2012-09-06

申请号：US13469828

申请日：2012-05-11

Applicant: Yuichi SHIBAZAKI

Inventor： Yuichi SHIBAZAKI

IPC: G03B27/42

CPC classification number: G03F7/70775 ,  G03F7/70341 ,  G03F7/70516 ,  G03F7/70725 ,  G03F7/70975 ,  Y10T29/49002 ,  Y10T29/49105 ,  Y10T29/49826

Abstract: A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this case, the drive unit can drive the wafer stage in a predetermined direction based on a measurement value after correction in which a measurement error caused by the flatness of the scale included in the measurement value of the encoder is corrected based on the information on the flatness of the scale. Accordingly, the wafer stage can be driven with high accuracy in a predetermined direction using the encoder, without being affected by the unevenness of the scale.

公开(公告)号：US20120127478A1

公开(公告)日：2012-05-24

申请号：US13357161

申请日：2012-01-24

Applicant: Yuichi SHIBAZAKI ,  Yasuhiro Hidaka

Inventor： Yuichi SHIBAZAKI ,  Yasuhiro Hidaka

IPC: G01B11/14 ,  G01B9/02 ,  B01J19/08 ,  G01B11/24

CPC classification number: G02B5/08 ,  G03F7/70775

Abstract: A reflecting member has: a first reflecting surface, which extends in a second direction that includes a first direction component; a second reflecting surface, which extends in a third direction that includes the first direction component, that is substantially symmetric to the first reflecting surface; and a third reflecting surface, which extends in a fourth direction, that is substantially orthogonal to the first direction.

Abstract translation: 反射构件具有：第一反射面，其在包括第一方向分量的第二方向上延伸; 第二反射面，其在包括第一方向分量的第三方向上延伸，其与第一反射面大致对称; 以及第三反射面，其在与第一方向大致正交的第四方向上延伸。